JPS60146336U - Semiconductor device manufacturing equipment - Google Patents
Semiconductor device manufacturing equipmentInfo
- Publication number
- JPS60146336U JPS60146336U JP3473484U JP3473484U JPS60146336U JP S60146336 U JPS60146336 U JP S60146336U JP 3473484 U JP3473484 U JP 3473484U JP 3473484 U JP3473484 U JP 3473484U JP S60146336 U JPS60146336 U JP S60146336U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- pelger
- device manufacturing
- heating device
- manufacturing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図乃至第５図は従来例を説明する図で、第１図は単
結晶基板を一枚のサセプタの上にのみ載置するエピタキ
シャル成長装置の断面図、第２図はサセプタを多段配置
したエピタキシャル成長装置の断面図、第３図はサセプ
タ上に載置された単 □結晶基板が熱歪みにより反
る状態を示す正面図、第４図及び第５図は埋め込み拡散
工程を順に示す断面図である。第６図は本考案の一実施
例を示す断面図、第７図は本考案に用いるサセプタの変
形例を示す平面図である。
１８・・・・・・ペルジャー、１９・・・・・・加熱装
置、２０・・・・・・サセプタ、２１・・・・・・ソー
ス気体の供給路、２４・・・・・・半導体装置の製造装
置（エピタキシャル成長装置）。Figures 1 to 5 are diagrams explaining conventional examples. Figure 1 is a cross-sectional view of an epitaxial growth apparatus in which a single crystal substrate is placed only on one susceptor, and Figure 2 is a cross-sectional view of an epitaxial growth apparatus in which susceptors are arranged in multiple stages. Figure 3 is a cross-sectional view of the epitaxial growth apparatus. Figure 3 is a front view showing the state in which a single crystal substrate placed on a susceptor is warped due to thermal strain. Figures 4 and 5 are cross-sectional views sequentially showing the embedding diffusion process. be. FIG. 6 is a sectional view showing an embodiment of the present invention, and FIG. 7 is a plan view showing a modification of the susceptor used in the present invention. 18...Pelger, 19...Heating device, 20...Susceptor, 21...Source gas supply path, 24...Semiconductor device manufacturing equipment (epitaxial growth equipment).
Claims (1)
いて複数段に配設された加熱装置と、各加熱装置に挾ま
れた空間に配置されたサセプタと、加熱装置とサセプタ
の中心を上下方向に貫通するように配設されたペルジャ
ーの内周面に向かってエピタキシャル成長用のソース気
体を供給する供給路とを含む半導体装置の製造装置。A Pelger, a heating device arranged in multiple stages at predetermined intervals in the vertical direction within the Pelger, a susceptor arranged in a space between each heating device, and a heating device arranged in a space between the heating devices and the susceptor in the vertical direction. A semiconductor device manufacturing apparatus including a supply path for supplying a source gas for epitaxial growth toward an inner circumferential surface of a Pelger disposed so as to penetrate therethrough.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3473484U JPS60146336U (en) | 1984-03-09 | 1984-03-09 | Semiconductor device manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3473484U JPS60146336U (en) | 1984-03-09 | 1984-03-09 | Semiconductor device manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60146336U true JPS60146336U (en) | 1985-09-28 |
Family
ID=30538384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3473484U Pending JPS60146336U (en) | 1984-03-09 | 1984-03-09 | Semiconductor device manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60146336U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5542230A (en) * | 1978-09-14 | 1980-03-25 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Vapor phase growing device |
-
1984
- 1984-03-09 JP JP3473484U patent/JPS60146336U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5542230A (en) * | 1978-09-14 | 1980-03-25 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Vapor phase growing device |
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