JPS5487700A - Gas phase magnespinel growing apparatus - Google Patents
Gas phase magnespinel growing apparatusInfo
- Publication number
- JPS5487700A JPS5487700A JP15679277A JP15679277A JPS5487700A JP S5487700 A JPS5487700 A JP S5487700A JP 15679277 A JP15679277 A JP 15679277A JP 15679277 A JP15679277 A JP 15679277A JP S5487700 A JPS5487700 A JP S5487700A
- Authority
- JP
- Japan
- Prior art keywords
- magnespinel
- heated
- gas phase
- tray
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: Mg and Al are passed through different passages in reactor and heated to a predetermined temperature, thereby to grow desired magnespinel on substrate without contaminating Al source.
CONSTITUTION: A tray 5b holds Mg 6b and a tray 5c holds Al 6c respectively. A lower hollow portion 2c holding Al has a length l2, preferably 1.5 to 2 times lenght l1 of an upper hollow portion 2b holding Mg. If l2 is shorter than this length, effective prevention of Al contamination is not achieved. Al is heated to 500 to 600°C by a heating means 7b and Mg is heated to 600 to 900°C by a heating means 7c. Mg is contacted with HCl gas. Carrier gas from an inlet port 8 mixes with reactive of Al and Mg and advances toward magnespinel substrates 10 which are heated to 1000 to 1300°C to effect growing of magnespinel single crystal to a desired thickness.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52156792A JPS6052118B2 (en) | 1977-12-26 | 1977-12-26 | Magnesia spinel vapor phase growth equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52156792A JPS6052118B2 (en) | 1977-12-26 | 1977-12-26 | Magnesia spinel vapor phase growth equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5487700A true JPS5487700A (en) | 1979-07-12 |
JPS6052118B2 JPS6052118B2 (en) | 1985-11-18 |
Family
ID=15635399
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52156792A Expired JPS6052118B2 (en) | 1977-12-26 | 1977-12-26 | Magnesia spinel vapor phase growth equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6052118B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0533368Y2 (en) * | 1987-07-24 | 1993-08-25 |
-
1977
- 1977-12-26 JP JP52156792A patent/JPS6052118B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6052118B2 (en) | 1985-11-18 |
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