JPS53134360A - Vapor phase growing method for compound semiconductor - Google Patents
Vapor phase growing method for compound semiconductorInfo
- Publication number
- JPS53134360A JPS53134360A JP4852377A JP4852377A JPS53134360A JP S53134360 A JPS53134360 A JP S53134360A JP 4852377 A JP4852377 A JP 4852377A JP 4852377 A JP4852377 A JP 4852377A JP S53134360 A JPS53134360 A JP S53134360A
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- growing method
- compound semiconductor
- phase growing
- grarium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the dispersion in mass-products, by changing the temperature gradient of the part where the substrate crystal is placed, in grarium arsenic vapor phase epitaxial growing method.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4852377A JPS53134360A (en) | 1977-04-28 | 1977-04-28 | Vapor phase growing method for compound semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4852377A JPS53134360A (en) | 1977-04-28 | 1977-04-28 | Vapor phase growing method for compound semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53134360A true JPS53134360A (en) | 1978-11-22 |
Family
ID=12805711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4852377A Pending JPS53134360A (en) | 1977-04-28 | 1977-04-28 | Vapor phase growing method for compound semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53134360A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS497991A (en) * | 1972-05-13 | 1974-01-24 |
-
1977
- 1977-04-28 JP JP4852377A patent/JPS53134360A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS497991A (en) * | 1972-05-13 | 1974-01-24 |
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