JPS533063A - Liquid phase epitaxial growth - Google Patents

Liquid phase epitaxial growth

Info

Publication number
JPS533063A
JPS533063A JP7691476A JP7691476A JPS533063A JP S533063 A JPS533063 A JP S533063A JP 7691476 A JP7691476 A JP 7691476A JP 7691476 A JP7691476 A JP 7691476A JP S533063 A JPS533063 A JP S533063A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
phase epitaxial
substrate crystal
grow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7691476A
Other languages
Japanese (ja)
Inventor
Takeshi Kobayashi
Yoshitaka Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7691476A priority Critical patent/JPS533063A/en
Publication of JPS533063A publication Critical patent/JPS533063A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To epitaxially grow a compound semiconductor out of liquid phase and evade grow steps by tilting the plane azimuth of the main plane of a substrate crystal by 0.5°;Wθ<3°from <100> or <111> direction of the substrate crystal.
COPYRIGHT: (C)1978,JPO&Japio
JP7691476A 1976-06-29 1976-06-29 Liquid phase epitaxial growth Pending JPS533063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7691476A JPS533063A (en) 1976-06-29 1976-06-29 Liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7691476A JPS533063A (en) 1976-06-29 1976-06-29 Liquid phase epitaxial growth

Publications (1)

Publication Number Publication Date
JPS533063A true JPS533063A (en) 1978-01-12

Family

ID=13618941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7691476A Pending JPS533063A (en) 1976-06-29 1976-06-29 Liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS533063A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033322A (en) * 1989-05-31 1991-01-09 Shin Etsu Handotai Co Ltd Liquid phase epitaxy method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033322A (en) * 1989-05-31 1991-01-09 Shin Etsu Handotai Co Ltd Liquid phase epitaxy method

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