JPS533063A - Liquid phase epitaxial growth - Google Patents
Liquid phase epitaxial growthInfo
- Publication number
- JPS533063A JPS533063A JP7691476A JP7691476A JPS533063A JP S533063 A JPS533063 A JP S533063A JP 7691476 A JP7691476 A JP 7691476A JP 7691476 A JP7691476 A JP 7691476A JP S533063 A JPS533063 A JP S533063A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- phase epitaxial
- substrate crystal
- grow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To epitaxially grow a compound semiconductor out of liquid phase and evade grow steps by tilting the plane azimuth of the main plane of a substrate crystal by 0.5°;Wθ<3°from <100> or <111> direction of the substrate crystal.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7691476A JPS533063A (en) | 1976-06-29 | 1976-06-29 | Liquid phase epitaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7691476A JPS533063A (en) | 1976-06-29 | 1976-06-29 | Liquid phase epitaxial growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS533063A true JPS533063A (en) | 1978-01-12 |
Family
ID=13618941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7691476A Pending JPS533063A (en) | 1976-06-29 | 1976-06-29 | Liquid phase epitaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS533063A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH033322A (en) * | 1989-05-31 | 1991-01-09 | Shin Etsu Handotai Co Ltd | Liquid phase epitaxy method |
-
1976
- 1976-06-29 JP JP7691476A patent/JPS533063A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH033322A (en) * | 1989-05-31 | 1991-01-09 | Shin Etsu Handotai Co Ltd | Liquid phase epitaxy method |
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