JPS5556096A - Vapor phase growing method - Google Patents
Vapor phase growing methodInfo
- Publication number
- JPS5556096A JPS5556096A JP12852978A JP12852978A JPS5556096A JP S5556096 A JPS5556096 A JP S5556096A JP 12852978 A JP12852978 A JP 12852978A JP 12852978 A JP12852978 A JP 12852978A JP S5556096 A JPS5556096 A JP S5556096A
- Authority
- JP
- Japan
- Prior art keywords
- grown
- substrate
- vapor
- phase
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To form a vapor-phase-grown film of a uniform thickness on the surface of a substrate by continuously reducing the temp. gradient in a furnace from the upper stream to the downstream of a gas flow direction in production of a semiconductor device by vapor-phase-growing various films.
CONSTITUTION: A substrate is set in a vapor phase growing furnace, a halogenated cpd. of a desired substance to be grown or an atomic or molecular substance to be grown is carried onto the substrate together with a carrier gas such as hydrogen or nitrogen, and the temp. gradient in the furnace along the gas flow direction is continuously reduced to grow a film. By this method the substance taking part in the reaction reaches all over the substrate surface at a uniform rate, and a grown film having a thickness uniformity degree of ±1.5% can be obtd. with high reproducibility.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12852978A JPS5556096A (en) | 1978-10-20 | 1978-10-20 | Vapor phase growing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12852978A JPS5556096A (en) | 1978-10-20 | 1978-10-20 | Vapor phase growing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5556096A true JPS5556096A (en) | 1980-04-24 |
JPS5621757B2 JPS5621757B2 (en) | 1981-05-21 |
Family
ID=14986995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12852978A Granted JPS5556096A (en) | 1978-10-20 | 1978-10-20 | Vapor phase growing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5556096A (en) |
-
1978
- 1978-10-20 JP JP12852978A patent/JPS5556096A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5621757B2 (en) | 1981-05-21 |
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