JPS5515941A - Crystal growing device - Google Patents
Crystal growing deviceInfo
- Publication number
- JPS5515941A JPS5515941A JP8680978A JP8680978A JPS5515941A JP S5515941 A JPS5515941 A JP S5515941A JP 8680978 A JP8680978 A JP 8680978A JP 8680978 A JP8680978 A JP 8680978A JP S5515941 A JPS5515941 A JP S5515941A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- crystal growing
- holder
- growing device
- free heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To provide a crystal growing device taking no n-type impurities in growing crystals by setting a liner tube made of Si-free heat resistant material and a substrate-supporting holder in a quartz reaction tube provided with outer heaters.
CONSTITUTION: Both ends of quartz tube 1 provided with outer heating means 4 are airtightly sealed with lids 2,3 having protective atmospheric gas introduction hole 2a. Liner tube 5 made of Si-free heat resistnat material is coaxially set inside tube 1, and in tube 5 holder 11 supporting semiconductor substrate 10 and slider 13 housing soln. 12 for growth are arranged.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8680978A JPS5515941A (en) | 1978-07-18 | 1978-07-18 | Crystal growing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8680978A JPS5515941A (en) | 1978-07-18 | 1978-07-18 | Crystal growing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5515941A true JPS5515941A (en) | 1980-02-04 |
Family
ID=13897133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8680978A Pending JPS5515941A (en) | 1978-07-18 | 1978-07-18 | Crystal growing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5515941A (en) |
-
1978
- 1978-07-18 JP JP8680978A patent/JPS5515941A/en active Pending
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