JPS5515941A - Crystal growing device - Google Patents

Crystal growing device

Info

Publication number
JPS5515941A
JPS5515941A JP8680978A JP8680978A JPS5515941A JP S5515941 A JPS5515941 A JP S5515941A JP 8680978 A JP8680978 A JP 8680978A JP 8680978 A JP8680978 A JP 8680978A JP S5515941 A JPS5515941 A JP S5515941A
Authority
JP
Japan
Prior art keywords
tube
crystal growing
holder
growing device
free heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8680978A
Other languages
Japanese (ja)
Inventor
Kenzo Akita
Kazuo Nakajima
Akio Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8680978A priority Critical patent/JPS5515941A/en
Publication of JPS5515941A publication Critical patent/JPS5515941A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To provide a crystal growing device taking no n-type impurities in growing crystals by setting a liner tube made of Si-free heat resistant material and a substrate-supporting holder in a quartz reaction tube provided with outer heaters.
CONSTITUTION: Both ends of quartz tube 1 provided with outer heating means 4 are airtightly sealed with lids 2,3 having protective atmospheric gas introduction hole 2a. Liner tube 5 made of Si-free heat resistnat material is coaxially set inside tube 1, and in tube 5 holder 11 supporting semiconductor substrate 10 and slider 13 housing soln. 12 for growth are arranged.
COPYRIGHT: (C)1980,JPO&Japio
JP8680978A 1978-07-18 1978-07-18 Crystal growing device Pending JPS5515941A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8680978A JPS5515941A (en) 1978-07-18 1978-07-18 Crystal growing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8680978A JPS5515941A (en) 1978-07-18 1978-07-18 Crystal growing device

Publications (1)

Publication Number Publication Date
JPS5515941A true JPS5515941A (en) 1980-02-04

Family

ID=13897133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8680978A Pending JPS5515941A (en) 1978-07-18 1978-07-18 Crystal growing device

Country Status (1)

Country Link
JP (1) JPS5515941A (en)

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