JPS5539021A - Automatic plate tester - Google Patents

Automatic plate tester

Info

Publication number
JPS5539021A
JPS5539021A JP11219678A JP11219678A JPS5539021A JP S5539021 A JPS5539021 A JP S5539021A JP 11219678 A JP11219678 A JP 11219678A JP 11219678 A JP11219678 A JP 11219678A JP S5539021 A JPS5539021 A JP S5539021A
Authority
JP
Japan
Prior art keywords
cassette
optical
tester
liftable
highly efficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11219678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6146971B2 (enExample
Inventor
Masakatsu Ogami
Nobuyoshi Tsuda
Hiroshi Nakajima
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP11219678A priority Critical patent/JPS5539021A/ja
Publication of JPS5539021A publication Critical patent/JPS5539021A/ja
Publication of JPS6146971B2 publication Critical patent/JPS6146971B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11219678A 1978-09-14 1978-09-14 Automatic plate tester Granted JPS5539021A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11219678A JPS5539021A (en) 1978-09-14 1978-09-14 Automatic plate tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11219678A JPS5539021A (en) 1978-09-14 1978-09-14 Automatic plate tester

Publications (2)

Publication Number Publication Date
JPS5539021A true JPS5539021A (en) 1980-03-18
JPS6146971B2 JPS6146971B2 (enExample) 1986-10-16

Family

ID=14580660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11219678A Granted JPS5539021A (en) 1978-09-14 1978-09-14 Automatic plate tester

Country Status (1)

Country Link
JP (1) JPS5539021A (enExample)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5789535A (en) * 1980-11-20 1982-06-03 Sanyo Electric Co Ltd Device for correcting mounted posture of part
JPS57152141A (en) * 1981-03-17 1982-09-20 Nec Kyushu Ltd Inspecting device for semiconductor substrate
JPS5836711U (ja) * 1981-09-03 1983-03-10 三菱電機株式会社 顕微鏡の載物台
JPS58178534A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd オリエンテ−シヨンフラツトの位置決め装置
JPS58214844A (ja) * 1982-05-24 1983-12-14 バリアン・アソシエイツ・インコ−ポレイテツド ウエフアの欠落又は破損を検出する装置
JPS59103806A (ja) * 1982-12-01 1984-06-15 日東電工株式会社 薄板状物品の包装装置
JPS59181617A (ja) * 1983-03-28 1984-10-16 シリコン・バレイ・グル−プ・インコ−ポレイテツド ウエ−ハ操作方法及び装置
JPS6113935U (ja) * 1984-06-29 1986-01-27 ロ−ム株式会社 物品の位置決め装置
JPS6197087A (ja) * 1984-10-19 1986-05-15 株式会社トプコン 検査装置
JPS61179549A (ja) * 1985-02-04 1986-08-12 Olympus Optical Co Ltd ウエハ検査顕微鏡装置
JPS6267431A (ja) * 1985-09-20 1987-03-27 Hitachi Electronics Eng Co Ltd 自動装填式デイスク型記録媒体検査装置
WO2009119323A1 (ja) * 2008-03-25 2009-10-01 株式会社トクヤマ 円形部材の心出し装置及びこれを備えたコーティング装置
CN103926544A (zh) * 2014-03-17 2014-07-16 上海美诺福科技股份有限公司 方圈插片装置、应用方圈插片装置检测硅钢片的方法
CN105590886A (zh) * 2016-02-23 2016-05-18 深圳市劲拓自动化设备股份有限公司 一种芯片模组封胶输送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4887780A (enExample) * 1972-02-18 1973-11-17
JPS50126175A (enExample) * 1974-03-22 1975-10-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4887780A (enExample) * 1972-02-18 1973-11-17
JPS50126175A (enExample) * 1974-03-22 1975-10-03

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5789535A (en) * 1980-11-20 1982-06-03 Sanyo Electric Co Ltd Device for correcting mounted posture of part
JPS57152141A (en) * 1981-03-17 1982-09-20 Nec Kyushu Ltd Inspecting device for semiconductor substrate
JPS5836711U (ja) * 1981-09-03 1983-03-10 三菱電機株式会社 顕微鏡の載物台
JPS58178534A (ja) * 1982-04-14 1983-10-19 Hitachi Ltd オリエンテ−シヨンフラツトの位置決め装置
JPS58214844A (ja) * 1982-05-24 1983-12-14 バリアン・アソシエイツ・インコ−ポレイテツド ウエフアの欠落又は破損を検出する装置
JPS59103806A (ja) * 1982-12-01 1984-06-15 日東電工株式会社 薄板状物品の包装装置
JPS59181617A (ja) * 1983-03-28 1984-10-16 シリコン・バレイ・グル−プ・インコ−ポレイテツド ウエ−ハ操作方法及び装置
JPS6113935U (ja) * 1984-06-29 1986-01-27 ロ−ム株式会社 物品の位置決め装置
JPS6197087A (ja) * 1984-10-19 1986-05-15 株式会社トプコン 検査装置
JPS61179549A (ja) * 1985-02-04 1986-08-12 Olympus Optical Co Ltd ウエハ検査顕微鏡装置
JPS6267431A (ja) * 1985-09-20 1987-03-27 Hitachi Electronics Eng Co Ltd 自動装填式デイスク型記録媒体検査装置
WO2009119323A1 (ja) * 2008-03-25 2009-10-01 株式会社トクヤマ 円形部材の心出し装置及びこれを備えたコーティング装置
JP5279819B2 (ja) * 2008-03-25 2013-09-04 株式会社トクヤマ レンズの心出し装置を備えたコーティング装置及びコーティング方法
CN103926544A (zh) * 2014-03-17 2014-07-16 上海美诺福科技股份有限公司 方圈插片装置、应用方圈插片装置检测硅钢片的方法
CN103926544B (zh) * 2014-03-17 2017-06-27 上海美诺福科技股份有限公司 应用方圈插片装置检测硅钢片的方法
CN105590886A (zh) * 2016-02-23 2016-05-18 深圳市劲拓自动化设备股份有限公司 一种芯片模组封胶输送装置

Also Published As

Publication number Publication date
JPS6146971B2 (enExample) 1986-10-16

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