JPS5539021A - Automatic plate tester - Google Patents
Automatic plate testerInfo
- Publication number
- JPS5539021A JPS5539021A JP11219678A JP11219678A JPS5539021A JP S5539021 A JPS5539021 A JP S5539021A JP 11219678 A JP11219678 A JP 11219678A JP 11219678 A JP11219678 A JP 11219678A JP S5539021 A JPS5539021 A JP S5539021A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- optical
- tester
- liftable
- highly efficient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Structure Of Belt Conveyors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To provide an optical tester which is highly efficient and which can be applied to difference sizes, by equipping a cassette table, a lifting mechanism, a plate conveyor mechanism, a plate stop holding mechanism and an optical testing unit.
CONSTITUTION: There are accommodated in a cassette 1a twenty silicone wafers having diameters 3, 4 and 5 inches. Two facing lifting mechanisms 3 and 3 are equipped with a liftable cassette table, and there are provided a liftable plate conveyor mechanism 4, a plate stop holding mechanism 6 midway thereof, and an optical testing unit. The wafers which are conveyed on a nylon belt 52 from the cassette 1a are stopped by a stopper 60 and inserted into an optical type defect detector by a vacuum chuck 67. It is possible to provide a highly efficient tester by sequentially controlling a series of those steps.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11219678A JPS5539021A (en) | 1978-09-14 | 1978-09-14 | Automatic plate tester |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11219678A JPS5539021A (en) | 1978-09-14 | 1978-09-14 | Automatic plate tester |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5539021A true JPS5539021A (en) | 1980-03-18 |
JPS6146971B2 JPS6146971B2 (en) | 1986-10-16 |
Family
ID=14580660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11219678A Granted JPS5539021A (en) | 1978-09-14 | 1978-09-14 | Automatic plate tester |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5539021A (en) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5789535A (en) * | 1980-11-20 | 1982-06-03 | Sanyo Electric Co Ltd | Device for correcting mounted posture of part |
JPS57152141A (en) * | 1981-03-17 | 1982-09-20 | Nec Kyushu Ltd | Inspecting device for semiconductor substrate |
JPS5836711U (en) * | 1981-09-03 | 1983-03-10 | 三菱電機株式会社 | microscope stage |
JPS58178534A (en) * | 1982-04-14 | 1983-10-19 | Hitachi Ltd | Positioning device for orieintation flat |
JPS58214844A (en) * | 1982-05-24 | 1983-12-14 | バリアン・アソシエイツ・インコ−ポレイテツド | Device for detecting breaking or damage of wafer |
JPS59103806A (en) * | 1982-12-01 | 1984-06-15 | 日東電工株式会社 | Packer for sheet-shaped article |
JPS59181617A (en) * | 1983-03-28 | 1984-10-16 | シリコン・バレイ・グル−プ・インコ−ポレイテツド | Method and device for operating wafer |
JPS6113935U (en) * | 1984-06-29 | 1986-01-27 | ロ−ム株式会社 | Article positioning device |
JPS6197087A (en) * | 1984-10-19 | 1986-05-15 | 株式会社トプコン | Inspection device |
JPS61179549A (en) * | 1985-02-04 | 1986-08-12 | Olympus Optical Co Ltd | Microscope device for wafer inspection |
JPS6267431A (en) * | 1985-09-20 | 1987-03-27 | Hitachi Electronics Eng Co Ltd | Automatic charging disk type recording medium tester |
WO2009119323A1 (en) * | 2008-03-25 | 2009-10-01 | 株式会社トクヤマ | Centering device for circular member and coater equipped with the same |
CN103926544A (en) * | 2014-03-17 | 2014-07-16 | 上海美诺福科技股份有限公司 | Square ring sheet insertion device and method for detecting silicon steel sheets through square ring sheet insertion device |
CN105590886A (en) * | 2016-02-23 | 2016-05-18 | 深圳市劲拓自动化设备股份有限公司 | Chip module group sealing compound conveying device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4887780A (en) * | 1972-02-18 | 1973-11-17 | ||
JPS50126175A (en) * | 1974-03-22 | 1975-10-03 |
-
1978
- 1978-09-14 JP JP11219678A patent/JPS5539021A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4887780A (en) * | 1972-02-18 | 1973-11-17 | ||
JPS50126175A (en) * | 1974-03-22 | 1975-10-03 |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5789535A (en) * | 1980-11-20 | 1982-06-03 | Sanyo Electric Co Ltd | Device for correcting mounted posture of part |
JPS6339368B2 (en) * | 1980-11-20 | 1988-08-04 | Sanyo Electric Co | |
JPS57152141A (en) * | 1981-03-17 | 1982-09-20 | Nec Kyushu Ltd | Inspecting device for semiconductor substrate |
JPS6226731Y2 (en) * | 1981-09-03 | 1987-07-09 | ||
JPS5836711U (en) * | 1981-09-03 | 1983-03-10 | 三菱電機株式会社 | microscope stage |
JPS58178534A (en) * | 1982-04-14 | 1983-10-19 | Hitachi Ltd | Positioning device for orieintation flat |
JPH0359582B2 (en) * | 1982-04-14 | 1991-09-11 | Hitachi Seisakusho Kk | |
JPS58214844A (en) * | 1982-05-24 | 1983-12-14 | バリアン・アソシエイツ・インコ−ポレイテツド | Device for detecting breaking or damage of wafer |
JPH0370902B2 (en) * | 1982-05-24 | 1991-11-11 | Varian Associates | |
JPS59103806A (en) * | 1982-12-01 | 1984-06-15 | 日東電工株式会社 | Packer for sheet-shaped article |
JPH0145975B2 (en) * | 1983-03-28 | 1989-10-05 | Shirikon Barei Guruupu Inc | |
JPS59181617A (en) * | 1983-03-28 | 1984-10-16 | シリコン・バレイ・グル−プ・インコ−ポレイテツド | Method and device for operating wafer |
JPS6113935U (en) * | 1984-06-29 | 1986-01-27 | ロ−ム株式会社 | Article positioning device |
JPS6197087A (en) * | 1984-10-19 | 1986-05-15 | 株式会社トプコン | Inspection device |
JPS61179549A (en) * | 1985-02-04 | 1986-08-12 | Olympus Optical Co Ltd | Microscope device for wafer inspection |
JPH0783043B2 (en) * | 1985-02-04 | 1995-09-06 | オリンパス光学工業株式会社 | Wafer inspection microscope device |
JPS6267431A (en) * | 1985-09-20 | 1987-03-27 | Hitachi Electronics Eng Co Ltd | Automatic charging disk type recording medium tester |
WO2009119323A1 (en) * | 2008-03-25 | 2009-10-01 | 株式会社トクヤマ | Centering device for circular member and coater equipped with the same |
JP5279819B2 (en) * | 2008-03-25 | 2013-09-04 | 株式会社トクヤマ | COATING DEVICE AND METHOD FOR COATING WITH LENS CENTERING DEVICE |
CN103926544A (en) * | 2014-03-17 | 2014-07-16 | 上海美诺福科技股份有限公司 | Square ring sheet insertion device and method for detecting silicon steel sheets through square ring sheet insertion device |
CN103926544B (en) * | 2014-03-17 | 2017-06-27 | 上海美诺福科技股份有限公司 | The method that silicon steel sheet is detected using square circle inserting piece device |
CN105590886A (en) * | 2016-02-23 | 2016-05-18 | 深圳市劲拓自动化设备股份有限公司 | Chip module group sealing compound conveying device |
Also Published As
Publication number | Publication date |
---|---|
JPS6146971B2 (en) | 1986-10-16 |
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