JPS5539021A - Automatic plate tester - Google Patents

Automatic plate tester

Info

Publication number
JPS5539021A
JPS5539021A JP11219678A JP11219678A JPS5539021A JP S5539021 A JPS5539021 A JP S5539021A JP 11219678 A JP11219678 A JP 11219678A JP 11219678 A JP11219678 A JP 11219678A JP S5539021 A JPS5539021 A JP S5539021A
Authority
JP
Japan
Prior art keywords
cassette
optical
tester
liftable
highly efficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11219678A
Other languages
Japanese (ja)
Other versions
JPS6146971B2 (en
Inventor
Masakatsu Ogami
Nobuyoshi Tsuda
Hiroshi Nakajima
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP11219678A priority Critical patent/JPS5539021A/en
Publication of JPS5539021A publication Critical patent/JPS5539021A/en
Publication of JPS6146971B2 publication Critical patent/JPS6146971B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To provide an optical tester which is highly efficient and which can be applied to difference sizes, by equipping a cassette table, a lifting mechanism, a plate conveyor mechanism, a plate stop holding mechanism and an optical testing unit.
CONSTITUTION: There are accommodated in a cassette 1a twenty silicone wafers having diameters 3, 4 and 5 inches. Two facing lifting mechanisms 3 and 3 are equipped with a liftable cassette table, and there are provided a liftable plate conveyor mechanism 4, a plate stop holding mechanism 6 midway thereof, and an optical testing unit. The wafers which are conveyed on a nylon belt 52 from the cassette 1a are stopped by a stopper 60 and inserted into an optical type defect detector by a vacuum chuck 67. It is possible to provide a highly efficient tester by sequentially controlling a series of those steps.
COPYRIGHT: (C)1980,JPO&Japio
JP11219678A 1978-09-14 1978-09-14 Automatic plate tester Granted JPS5539021A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11219678A JPS5539021A (en) 1978-09-14 1978-09-14 Automatic plate tester

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11219678A JPS5539021A (en) 1978-09-14 1978-09-14 Automatic plate tester

Publications (2)

Publication Number Publication Date
JPS5539021A true JPS5539021A (en) 1980-03-18
JPS6146971B2 JPS6146971B2 (en) 1986-10-16

Family

ID=14580660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11219678A Granted JPS5539021A (en) 1978-09-14 1978-09-14 Automatic plate tester

Country Status (1)

Country Link
JP (1) JPS5539021A (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5789535A (en) * 1980-11-20 1982-06-03 Sanyo Electric Co Ltd Device for correcting mounted posture of part
JPS57152141A (en) * 1981-03-17 1982-09-20 Nec Kyushu Ltd Inspecting device for semiconductor substrate
JPS5836711U (en) * 1981-09-03 1983-03-10 三菱電機株式会社 microscope stage
JPS58178534A (en) * 1982-04-14 1983-10-19 Hitachi Ltd Positioning device for orieintation flat
JPS58214844A (en) * 1982-05-24 1983-12-14 バリアン・アソシエイツ・インコ−ポレイテツド Device for detecting breaking or damage of wafer
JPS59103806A (en) * 1982-12-01 1984-06-15 日東電工株式会社 Packer for sheet-shaped article
JPS59181617A (en) * 1983-03-28 1984-10-16 シリコン・バレイ・グル−プ・インコ−ポレイテツド Method and device for operating wafer
JPS6113935U (en) * 1984-06-29 1986-01-27 ロ−ム株式会社 Article positioning device
JPS6197087A (en) * 1984-10-19 1986-05-15 株式会社トプコン Inspection device
JPS61179549A (en) * 1985-02-04 1986-08-12 Olympus Optical Co Ltd Microscope device for wafer inspection
JPS6267431A (en) * 1985-09-20 1987-03-27 Hitachi Electronics Eng Co Ltd Automatic charging disk type recording medium tester
WO2009119323A1 (en) * 2008-03-25 2009-10-01 株式会社トクヤマ Centering device for circular member and coater equipped with the same
CN103926544A (en) * 2014-03-17 2014-07-16 上海美诺福科技股份有限公司 Square ring sheet insertion device and method for detecting silicon steel sheets through square ring sheet insertion device
CN105590886A (en) * 2016-02-23 2016-05-18 深圳市劲拓自动化设备股份有限公司 Chip module group sealing compound conveying device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4887780A (en) * 1972-02-18 1973-11-17
JPS50126175A (en) * 1974-03-22 1975-10-03

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4887780A (en) * 1972-02-18 1973-11-17
JPS50126175A (en) * 1974-03-22 1975-10-03

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5789535A (en) * 1980-11-20 1982-06-03 Sanyo Electric Co Ltd Device for correcting mounted posture of part
JPS6339368B2 (en) * 1980-11-20 1988-08-04 Sanyo Electric Co
JPS57152141A (en) * 1981-03-17 1982-09-20 Nec Kyushu Ltd Inspecting device for semiconductor substrate
JPS6226731Y2 (en) * 1981-09-03 1987-07-09
JPS5836711U (en) * 1981-09-03 1983-03-10 三菱電機株式会社 microscope stage
JPS58178534A (en) * 1982-04-14 1983-10-19 Hitachi Ltd Positioning device for orieintation flat
JPH0359582B2 (en) * 1982-04-14 1991-09-11 Hitachi Seisakusho Kk
JPS58214844A (en) * 1982-05-24 1983-12-14 バリアン・アソシエイツ・インコ−ポレイテツド Device for detecting breaking or damage of wafer
JPH0370902B2 (en) * 1982-05-24 1991-11-11 Varian Associates
JPS59103806A (en) * 1982-12-01 1984-06-15 日東電工株式会社 Packer for sheet-shaped article
JPH0145975B2 (en) * 1983-03-28 1989-10-05 Shirikon Barei Guruupu Inc
JPS59181617A (en) * 1983-03-28 1984-10-16 シリコン・バレイ・グル−プ・インコ−ポレイテツド Method and device for operating wafer
JPS6113935U (en) * 1984-06-29 1986-01-27 ロ−ム株式会社 Article positioning device
JPS6197087A (en) * 1984-10-19 1986-05-15 株式会社トプコン Inspection device
JPS61179549A (en) * 1985-02-04 1986-08-12 Olympus Optical Co Ltd Microscope device for wafer inspection
JPH0783043B2 (en) * 1985-02-04 1995-09-06 オリンパス光学工業株式会社 Wafer inspection microscope device
JPS6267431A (en) * 1985-09-20 1987-03-27 Hitachi Electronics Eng Co Ltd Automatic charging disk type recording medium tester
WO2009119323A1 (en) * 2008-03-25 2009-10-01 株式会社トクヤマ Centering device for circular member and coater equipped with the same
JP5279819B2 (en) * 2008-03-25 2013-09-04 株式会社トクヤマ COATING DEVICE AND METHOD FOR COATING WITH LENS CENTERING DEVICE
CN103926544A (en) * 2014-03-17 2014-07-16 上海美诺福科技股份有限公司 Square ring sheet insertion device and method for detecting silicon steel sheets through square ring sheet insertion device
CN103926544B (en) * 2014-03-17 2017-06-27 上海美诺福科技股份有限公司 The method that silicon steel sheet is detected using square circle inserting piece device
CN105590886A (en) * 2016-02-23 2016-05-18 深圳市劲拓自动化设备股份有限公司 Chip module group sealing compound conveying device

Also Published As

Publication number Publication date
JPS6146971B2 (en) 1986-10-16

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