JPS6226731Y2 - - Google Patents

Description

[Detailed Description of the Invention] This invention relates to a stage for a microscope on which a plurality of substrates having predetermined external dimensions can be placed, in a microscope in which a substrate is placed for observation. In the following, a case where a semiconductor wafer is the object to be inspected will be described as an example.

Semiconductor wafers are subjected to diffusion processing, photolithography processing, vapor deposition processing, and the like during device manufacturing. If there is an abnormality in the element pattern formed through such processing steps, it will affect the yield, reliability, etc. of the product. Therefore, after completing a predetermined processing step, an inspection is performed to check electrically and optically whether the desired element pattern has been formed. Here, in optical inspection,
Usually, a microscope is used to check the size and shape of the element pattern.

Figure 1 is a front view schematically showing a conventional microscope.
1 is a microscope, 2 is a moving table, and 3 is a stage. The semiconductor wafer housed in the carrier is held with tweezers made of fluororesin or the like, taken out, and placed on the stage 3 of the microscope 1. This loading table 3 is
As shown in FIGS. 2a and 2b, a flat top surface is used, but when a semiconductor wafer is placed on this stage 3A, air is trapped between the semiconductor wafer and the stage 3A. It may slide on the stage 3A. In order to reduce this, as shown in FIGS. 2c and 2d, a stage 3B is also used in which a groove 4 is formed in the upper surface of the stage 3B to reduce the sliding.

However, although the above-mentioned mounting tables 3A and 3B are equipped with a stopper 5 to prevent the semiconductor wafer from falling around the periphery, it cannot be fixed at a fixed position depending on the external dimensions of the semiconductor wafer. and the loading direction cannot be fixed. During inspection, it is difficult to align the semiconductor wafers in parallel or to select inspection positions in the same row or column, and the setting takes time. Further, in some cases, there is a disadvantage that it is necessary to replace the stage with a dedicated stage depending on the external dimensions of the semiconductor wafer.

This idea was made in order to eliminate the above-mentioned drawbacks, and for substrates having multiple outer diameter dimensions, a mounting part corresponding to each dimension is provided, so that it is possible to eliminate the need to replace the mounting stage. To provide a stage for a microscope on which a stage can be mounted.
This idea will be explained below.

Figures 3, 4, and 5 show each part of an embodiment of this invention. Figure 3 shows the mounting and fixing table, Figure 4 shows the slider, and Figure 5 shows the stage. be.

First, with respect to the microscope 1 in Fig. 1,
A mounting and fixing table 6 shown in FIG. 3 is set on the moving table 2 which moves in the direction. The mounting and fixing table 6 is provided with a guide groove 7, along which a slider 8 having a guide 9 shown in FIG. 4, which can be inserted and removed, is attached. The slider 8 has a fixing pin 10 for attaching the stage 11 shown in FIG.
is located in the center. On the other hand, as shown in FIG. 5, the stage 11 is provided with an engagement hole 14 in the center for rotatably engaging the fixing pin 10 for attachment to the slider 8.
1 to the slider 8. This stage 11 has a size corresponding to the external dimensions of the semiconductor wafer (for example, 3 inches, 4 inches, etc.), and is approximately 2 to 3 inches long.
The mounting portion 12 is formed to have dimensions with a margin of mm, and has a step that becomes higher from the center toward the ends. Furthermore, a groove 13 is formed on the upper surface of the mounting portion 12 to prevent the semiconductor wafer from floating when it is mounted. Furthermore, four notches 15 are formed for gripping semiconductor wafers, and the mounting portion 12 thereof has a cross shape.

When inspecting a semiconductor wafer, the semiconductor wafer is taken out from the carrier using fluororesin tweezers and placed on a mounting portion 12 of predetermined external dimensions on a mounting stage 11 on the slider 8 that has been pulled out. At this time, the semiconductor wafer is prevented from floating up by the groove 13 of the mounting section 12, and since the periphery is raised, it will not slide on the mounting section 12 and come off. Note that the height h of the peripheral portion of the mounting portion 12 may be set to the thickness of the semiconductor wafer or approximately 1/2 of the thickness.

Further, the stage 11 has a notch 15 formed in the shape of a cross as shown in FIG. 5A so that the semiconductor wafer can be easily placed and removed using tweezers. Note that the shape and number of the grooves 13 and the shape of the notches 15 are not particularly limited. Furthermore, the material of the stage 11 and the like may be selected as appropriate.

After placing the semiconductor wafer on the placing section 12, the slider 8 is pushed onto the placing and fixing table 6 to a predetermined position. After that, focusing is performed according to a predetermined pattern,
Next, inspection is performed by aligning the element patterns in parallel or aligning them to predetermined chips on the semiconductor wafer when selecting inspection rows and columns, as necessary. Here, the stage 11 is held by a fixing pin 10, but it is designed to be able to rotate freely, so it can be turned in a desired direction, making it easy to set parallel or to set inspection rows and columns. can be done.

Note that if the method of placing the semiconductor wafer on the stage 11 of this invention and then pushing it to the desired position is used, the objective object will be It also prevents the semiconductor wafer from being damaged by contact with the lens.
Furthermore, when a semiconductor wafer has been inspected and a semiconductor wafer with external dimensions different from the previous one is to be inspected, there is no need to replace the mounting table 11 since the mounting sections 12 of various sizes are provided. In addition, the test can be performed using the same operations as above.

As explained above, this invention has a mounting section of a size corresponding to the external dimensions of various substrates, and allows the use of the same mounting stage without replacing the mounting stage. Substrates of various sizes can be inspected. Moreover, since the stage is rotatable, there is no need to directly move the substrate for parallel alignment, and when determining the inspection position, the same inspection row or column in the X or Y direction can be used. It is easy to select the mounting area, and since the mounting part has a step and the surrounding area is raised, the semiconductor wafer does not fall out. Furthermore, since the mounting portion has a notch for gripping the placed test object, it has great practical effects such as extremely easy grip of the test object.

[Brief explanation of the drawing]

Figure 1 is a schematic front view of a conventional microscope;
Figures a to d show conventional examples of the stage; Figures 2 a and c are plan views, Figures 2 b and d are side views, and Figures 3 to 5 are one embodiment of the present invention. Examples are shown in Figures 3a and b, a top view and a side view of the mounting and fixing table, Figures 4a and b are a top view and side view of the slider, and Figures 5a and b of the mounting table. Plan view and A
- It is a side sectional view taken on the A line. In the figure, 1 is a microscope, 2 is a moving table, 6 is a mounting/fixing base, 7 is a guide groove, 8 is a slider, 9 is a guide, 10 is a fixing pin, 11 is a stage, 12 is a mounting part, 13 14 is a groove, 14 is an engagement hole, and 15 is a notch. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

[Scope of utility model registration request] A mounting/fixing base to be placed on the moving table of the microscope, a slider having a guide portion that slides by engaging with a guide groove of the mounting/fixing base, and detachably attached to the slider and rotatably at the center. A plurality of steps are formed, each having a predetermined inner diameter dimension, and are higher from the center toward the ends, and a mounting portion has a notch for grasping the test object placed thereon. Features a microscope stage.