JPS6197087A - Inspection device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION f.1' The present invention relates to an inspection device for inspecting test objects by moving and transporting test objects of various sizes.

Conventionally, there is an inspection device that illuminates the surface of an object to be inspected, such as a wafer, with a laser beam and detects the reflected beam to inspect for scratches, dirt, etc. on the surface of the object to be inspected. ing.

In this type of inspection device, a large number of test objects are stored in the storage case in advance, and in order to test the test objects,
The objects to be inspected are sequentially conveyed one by one, and inspection is performed during that time. In such an inspection device, it is necessary to test objects of various scoribilities, and for this reason, a storage case part for storing the test objects in advance and a test object holder part in the transport device are used. The sizes must be matched, so that test object holders having different dimensions can be converted in accordance with the size of the test object.

Ro said, ``Let's do it.''

However, in this type of conventional device, if a specimen holder of a size that does not correspond to the storage case is mistakenly attached, it cannot be detected, and the specimen is not transported correctly. There was a risk of damage.

To 11 Specific Pressure The present invention eliminates the drawbacks of the prior art and determines whether or not a storage case and a specimen holder of corresponding size are attached, It is an object of the present invention to provide an inspection device in which a conveying device can be driven only when a correspondingly sized test object holder is attached.

1191H The gist of this invention is to provide a storage case portion configured to be selectively attachable depending on the size of the object to be examined;
A storage case attached to an inspection device that has a test object holder that can be replaced according to the size of the test object and a transfer device for moving and transporting the test object for test object inspection. and a detection means for identifying the test object holder,
The inspection device is characterized in that it is configured such that the transport device can be driven only when the size of the actually attached storage case portion matches the size of the test object holder portion.

1 yaw Figure 1 is equipped with a conveyance device, which allows objects to be inspected such as wafers (hereinafter, explanation will be given simply by taking wafers as an example).
This figure shows an outline of an inspection device for transporting and inspecting during transportation.

As is well known, the measuring section 10 of the inspection device irradiates a laser beam from a light source 11 onto the wafer 14, receives scattered reflected light caused by abnormalities on the surface by a photoelectric conversion element 12 such as a photomultiplier tube, and converts it into an electrical signal. The electrical signal is sent to the control device 13, where it is processed in a predetermined manner to measure scratches, dust, dirt, etc. on the surface of the wafer 14, and sent to a display device such as a cathode ray tube (CRT>15) or printer 16. It's designed to make you feel stronger.

In the measurement state shown in FIG. 1, the wafer 14 is fixed to a turntable type chuck section 17 by vacuum action. The vacuum hole 17a of the chuck section 17 is connected to a vacuum source 18, so that the wafer 14 can be fixed and held by vacuum if necessary.

A first storage case section 20 and a second storage case section 23 are provided on the starting side and the ending side, respectively, and a large number of wafers 1
wafers 14 are stored in a first storage case section 20, and the wafers 14 are transported one by one from the storage case section 20 within a horizontal plane by a first transport section 21. Each wafer 14 is then transferred to the chuck section 17 via a first test object holder section 29, which will be described later, and is fixedly held there by vacuum. The chuck section 17 passes through the measurement section 10 and is transferred to the second transport section 22 on the opposite side to a second specimen holder section 42, which will be described later.
transferred via. The wafers 14 are transported by the second transport section 22 and sequentially stored in the M2 storage case section 23.

As shown in detail in FIGS. 2 and 3, the first conveyor 21 is in the form of a conveyor with flexible endless conveyor members 26, 27 on both sides of the frame 25, respectively. The wafer 14 is transported from the first storage case section 20 to the first test object pedestal section 29 while supporting the peripheral edge of the wafer 14 at a height of .27.

The driving force for the transport members 26,27 is transmitted from the motor 19 via the belt 28.

The elevator 30 is arranged at one end side of the transport member 26, 27, and the first storage case part 20 is placed at a predetermined position above the elevator 30.
can be set in a detachable manner. The entire upper part of the elevator 30 is approximately H-shaped, and the first storage case part 20, which is set in its upper surface, can be moved by a predetermined amount in the vertical direction. This elevator-3
0 is formed with a female threaded portion (not shown), which engages with a vertical threaded rod 31, and which also engages with a vertical threaded rod 31.
is connected to a gear on the motor 33 side via a gear 32. That is, the driving force of the motor 33 is transmitted to the threaded rod 31 to move the elevator 30 in the vertical direction.

On the other hand, on the other end side of the transport members 26 and 27 of the first transport section 21, a first test object holder section 29 is provided. A circular hole is formed in the center of the first test object holder 29, and a step-shaped holder 29a having a size corresponding to the size of the wafer is formed in the green part of the hole. ing.

The stepped receiving portion 29a supports the wafer 14 transported by the transport member 26 in a fixed position, and is configured in a shape that does not interfere with the shaft 45 joined to the chuck portion 17, which will be described later. wafer 14
The peripheral edge part of is adapted to enter into the receiving part 29a and be supported.

This first test object holder 29 is designed to match the size of the wafer to be measured. If the wafer is large, a pedestal portion having a pedestal size indicated by a dotted line N is attached.

The second transport section 22 side is also provided with a transport mechanism similar to that of the first transport section 21 described above, and will be given the same reference numeral and a description thereof will be omitted.

As shown in FIGS. 4 and 5, the first test object holder 29 is removably fixed to the upper ends of two vertically arranged connecting rods 35 with a nut 36. As shown in FIGS. These connecting rods 35 are movable up and down while being guided by a guide 37. The lower end of the connecting rod 35 is fixed to a flat plate-shaped follower 38, as shown in FIG. A rotating shaft 40 of the motor 39 is fixed to an eccentric cam 41, and the eccentric cam 41 is engaged with the aforementioned driven body 38. Therefore, in accordance with the rotation of the motor 39, the connecting rod 35 and the @1 test object holder can be moved in the vertical direction together with the platform 29 by the action of the eccentric cam 41.

Since the second test object holder 42 has the same vertical movement mechanism as the first test object 29 described above, it will be designated by the same reference numeral and a description thereof will be omitted.

To explain in detail the operating mechanism of the measuring section 10, a vacuum hole 17a is formed in the center of the table-type chuck section 17, and this vacuum hole 17a is connected to the vacuum source 18 as described above. Chuck part 17
is coupled to the shaft 45 of a motor 46, and an encoder 47 is provided adjacent to the motor 46. With such a configuration, the rotational force of the motor 46 is transmitted to the chuck portion 17 so that it rotates at a predetermined speed.

The chuck portion 17, the motor 46, and others are fixed as a unit to the frame 52, and the entire guide rail 5
It is movable in the left and right direction in FIG. 4 along line 0151.

A horizontally arranged threaded rod 53 is threadedly engaged with a female threaded portion (not shown) on the frame 52 side, and the threaded rod 53 is rotated by a motor 55 via a belt 54.

Note that in this embodiment, the chuck section 17 is configured to rotate the wafer and simultaneously transport it in a horizontal plane, but if the chuck section 17 is configured to scan the laser beam irradiated onto the wafer, the chuck section 17 can rotate and simultaneously transport the wafer in a horizontal plane. There's no need to do it.

As shown in FIGS. 2 and 6, the first conveyance section 21 and the second conveyance section 22, particularly in the part of the elevator 30 where the storage case is installed, are provided with shape detection means for the storage case. That is, three holes 30a, 30b, and 30c are formed on the upper surface of the storage case installation part of the elevator 30, and the microswitch 50 is set in each of the holes 30a, 130b, and 30c, and the first storage case is set therein. The shape of the part 20 (in particular, the size can be detected. For example, when three types of storage case parts 20 are used,
When a large object is set, the microswitch 50 provided in the outer hole 3Qa is activated, and when a medium-sized object is set, the microswitch 50 in the inner hole 30b is activated, and a small object is set. At this time, the microswitch 50 in the inner hole 30C is activated. These microswitches 50 are electrically connected to the aforementioned control device 13 (FIG. 1).

Further, the first test object holder part 29 and the second test object holder part 42 are also provided with means for detecting their shapes, particularly the dimensions of the receiver parts 29a and 42a. That is, as shown in FIG. 7, three holes 29b (only one is shown in the figure, but there are actually three holes) are formed on the back surface of each of these test object holders 29 and 42. Then, the microswitch 52 is set accordingly. Depending on which microswitch 52 among the three microswitches 52 is activated, the shapes of the first test object holder 29 and the second test object 42 actually mounted are detected. be'. These microswitches 52 are also connected to the control device 13.
It is connected to the.

The control device 1 is designed in advance so that the entire inspection device becomes operable only when the shapes of the first and second storage case portions 20123 and the two first and second test object holders 42 match.
3 (Figure 1) is the setting.

FIG. 8 shows an example of the appearance of a surface inspection apparatus equipped with the above-mentioned conveyance device. An inspection device main body 60 is arranged in the lower part of the surface inspection device, and a control device 13, a printer 16, and other main components are arranged inside the inspection device main body 60. An elevator 30, a first conveyance section 21, a second conveyance section 22, a chuck section 17, etc. are arranged in the upper part of the inspection device main body 60, and the chuck section 17 is covered with the above-mentioned cover part 65. Measuring section 10
is arranged. A clean unit 62 is provided above the measuring section 10. Clean unit 6
A narrow or lean space 63 is formed between 2 and the inspection device main body 60. The measuring section 10 is
The measuring section 10 is placed in a chamber 63 so that the measuring section 10 can be used in an extremely clean state. The clean unit 62 is equipped with a well-known air cleaning mechanism for cleaning the air in the clean space 63, and sends clean air downward. The cover portion 65 is configured in a shape that prevents harmful external light from entering the measuring section 10 and prevents air from above from causing turbulence in the clean space 63 that would impede measurement. clean space 6
3 is formed by transparent plates on three or four sides. Of course, if the four transparent plates keep it sealed, the front transparent plate can be opened and closed as needed.

Further, a cathode ray tube 15 for displaying the measurement results of the wafer 14 is built into the clean unit 62. The cathode ray tube 15 is built in and tilted downward so that it can be easily observed by a measurer without being subjected to reflection of external light.

FIG. 9 is an explanatory diagram showing the operation of the conveying device shown in FIGS. 1 to 7. First, the first and second storage case parts 2
0 and 23 in the elevator 30 and press the start button of the surface inspection apparatus, the initial setting state shown in FIG. 2 is entered. That is, both storage case parts 20.23 are arranged on the upper surface of the elevator 30 in the most raised state. Thereafter, the first storage case section 20 on the departure side is lowered by one storage stage, and in parallel therewith, the second storage case section 23 on the end point side is lowered to the lowest position.

After that, the first storage case section 20 on the departure side is lowered by one step, and one wafer 14 is placed on the transfer member 26, 27 of the first transfer section 21, thereby being transferred in the direction of arrow 1. . The wafer 14 is the first test object pedestal part 2
9, the first test object holder 29 is in the direction of arrow 2.
The wafer 14 is moved upward in the direction shown in FIG. and wafer 14
is held by the first test object holder 29 and further rises in the direction of arrow 2. After that, the chuck section 17
4 from the direction of arrow 3 and stops. Thereafter, the first test object holder 29 descends in the direction of arrow 4. The wafer 14 is then transferred from the first test object holder 29 to the chuck section 17 and fixed by the chuck section 17 by vacuum action. And the chuck part 17
moves in the direction of arrow 5 while rotating, and during that time the measuring section 1
A predetermined measurement is performed from zero. The chuck part 17 is the second
When the wafer 14 reaches the specimen holder 42, the vacuum action of the chuck 17 is stopped and the wafer 14 is released. Thereafter, the second test object holder section 42 moves up in the direction of arrow 6 and receives the wafer 14 from the chuck section 17 .

The chuck part 17 is then moved in the direction of arrow 7.3.

During this time, the second test object holder 42 descends again in the direction of the arrow 8. Thus, the wafer 14 is attached to the second test object holder 42.
from there to the second conveyance section 22, and is conveyed in the direction of arrow 9 by the second conveyance section 22. Finally, it is stored in an appropriate position at the top of the second storage case section 23 on the terminal side from the second transport section 22.

The above-mentioned transfer and measurement operations are repeated for each wafer 14, and each wafer 14 in the first storage case section 20 on the starting side is sequentially placed in a predetermined stage of the second storage case section 23 on the end point side from the top to the bottom. I'm going to store it there.

[Brief explanation of the drawing]

Fig. 1 is a block diagram schematically showing an inspection device equipped with a transport device, Fig. 2 is a perspective view schematically showing the transport device, and Fig. 3 is a schematic perspective view showing the first transport section of the transport device. Figure 4 is a schematic perspective view showing a mechanism related to the chuck part of the transport device, Figure 5 is a schematic front view showing a part of the drive mechanism of the specimen holder, and Figure 6 is a storage case installation part of the transport device. FIG. 7 is a schematic cross-sectional view showing the type detection means of the test object holder on the stand, FIG. 8 is a schematic perspective view showing the external appearance of the test object surface inspection device, and FIG. The figure is a schematic explanatory diagram showing the transport route of the test object. 10... Measuring section 21... First transport section 22... Second transport section 20.23... Storage case section 14... Test object (Wafer) 30... Elevator - 2, 42... Test object pedestal section 17... Chuck section 13... Control device 15... Braun tube 60...Inspection device body 62...Clean unit 63...Clean space drawing purification (no change in content) Fig. 1 Fig. 2 Fig. 5 Fig. 6 Figure 7 Diagram Q Procedural amendment (voluntary) July 8, 1982

Claims (1)

[Scope of Claims] The present invention includes a storage case portion that can be selectively attached according to the size of the object to be examined, and an object holder that can be replaced depending on the size of the object to be examined. In an inspection device consisting of a transport device for moving and transporting a test object for testing the test object, a detection means is provided to identify the installed storage case section and test object holder section, and it is possible to 1. An inspection device characterized in that the transport device is configured to be able to be driven only when the size of the storage case portion matches the size of the test object holder portion.