JPS55165681A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS55165681A JPS55165681A JP7413479A JP7413479A JPS55165681A JP S55165681 A JPS55165681 A JP S55165681A JP 7413479 A JP7413479 A JP 7413479A JP 7413479 A JP7413479 A JP 7413479A JP S55165681 A JPS55165681 A JP S55165681A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- film
- wiring layer
- impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 6
- 150000002500 ions Chemical class 0.000 abstract 4
- 239000012535 impurity Substances 0.000 abstract 3
- 238000002347 injection Methods 0.000 abstract 2
- 239000007924 injection Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7413479A JPS55165681A (en) | 1979-06-11 | 1979-06-11 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7413479A JPS55165681A (en) | 1979-06-11 | 1979-06-11 | Preparation of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55165681A true JPS55165681A (en) | 1980-12-24 |
JPH0456456B2 JPH0456456B2 (ja) | 1992-09-08 |
Family
ID=13538408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7413479A Granted JPS55165681A (en) | 1979-06-11 | 1979-06-11 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55165681A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4543597A (en) * | 1982-06-30 | 1985-09-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Dynamic semiconductor memory and manufacturing method thereof |
JPS61187330A (ja) * | 1985-02-15 | 1986-08-21 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPS61194873A (ja) * | 1985-02-25 | 1986-08-29 | Toshiba Corp | 半導体装置 |
JPH0226021A (ja) * | 1988-07-14 | 1990-01-29 | Matsushita Electron Corp | 多層配線の形成方法 |
JPH02197120A (ja) * | 1988-07-29 | 1990-08-03 | Samsung Electron Co Ltd | 半導体素子の金属配線方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4943574A (ja) * | 1972-08-30 | 1974-04-24 | ||
JPS5372482A (en) * | 1976-12-08 | 1978-06-27 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
-
1979
- 1979-06-11 JP JP7413479A patent/JPS55165681A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4943574A (ja) * | 1972-08-30 | 1974-04-24 | ||
JPS5372482A (en) * | 1976-12-08 | 1978-06-27 | Matsushita Electric Ind Co Ltd | Manufacture for semiconductor device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4543597A (en) * | 1982-06-30 | 1985-09-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Dynamic semiconductor memory and manufacturing method thereof |
JPS61187330A (ja) * | 1985-02-15 | 1986-08-21 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPS61194873A (ja) * | 1985-02-25 | 1986-08-29 | Toshiba Corp | 半導体装置 |
JPH0226021A (ja) * | 1988-07-14 | 1990-01-29 | Matsushita Electron Corp | 多層配線の形成方法 |
JPH02197120A (ja) * | 1988-07-29 | 1990-08-03 | Samsung Electron Co Ltd | 半導体素子の金属配線方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0456456B2 (ja) | 1992-09-08 |
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