JPS55163846A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS55163846A
JPS55163846A JP7085679A JP7085679A JPS55163846A JP S55163846 A JPS55163846 A JP S55163846A JP 7085679 A JP7085679 A JP 7085679A JP 7085679 A JP7085679 A JP 7085679A JP S55163846 A JPS55163846 A JP S55163846A
Authority
JP
Japan
Prior art keywords
substrate
electron beam
insulating film
wiring layer
metallic wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7085679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138852B2 (OSRAM
Inventor
Hiroo Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7085679A priority Critical patent/JPS55163846A/ja
Publication of JPS55163846A publication Critical patent/JPS55163846A/ja
Publication of JPS6138852B2 publication Critical patent/JPS6138852B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/60—

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)
JP7085679A 1979-06-06 1979-06-06 Manufacture of semiconductor device Granted JPS55163846A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7085679A JPS55163846A (en) 1979-06-06 1979-06-06 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7085679A JPS55163846A (en) 1979-06-06 1979-06-06 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55163846A true JPS55163846A (en) 1980-12-20
JPS6138852B2 JPS6138852B2 (OSRAM) 1986-09-01

Family

ID=13443618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7085679A Granted JPS55163846A (en) 1979-06-06 1979-06-06 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55163846A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56500911A (OSRAM) * 1979-07-24 1981-07-02
JPS63146449A (ja) * 1986-12-10 1988-06-18 Sharp Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56500911A (OSRAM) * 1979-07-24 1981-07-02
JPS63146449A (ja) * 1986-12-10 1988-06-18 Sharp Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6138852B2 (OSRAM) 1986-09-01

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