JPS55141604A - Oil film thickness measuring apparatus - Google Patents
Oil film thickness measuring apparatusInfo
- Publication number
- JPS55141604A JPS55141604A JP4905479A JP4905479A JPS55141604A JP S55141604 A JPS55141604 A JP S55141604A JP 4905479 A JP4905479 A JP 4905479A JP 4905479 A JP4905479 A JP 4905479A JP S55141604 A JPS55141604 A JP S55141604A
- Authority
- JP
- Japan
- Prior art keywords
- oil film
- radiation energy
- mirrors
- film thickness
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To enable to measure oil film thickness precisely, without being affected by environmental changes or fluctuations of light source, by providing light source, filter, detector of radiation energy reflected by the oil film and substrate surface, and arithmetic unit.
CONSTITUTION: Radiation energy released from a light source 11 is caused to enter an oil film 2 on a substrate 1 being measured, through reflecting mirrors 12, 13, filters 14, 15, modulator 16, half mirrors 17, 27, and reflecting mirrors 18, 20. One radiation energy I0 is reflected by the surface of the oil film 2 to become radiation energy I2, and is detected by a detector 24 as an electrical amount V2 through mirrors 20, 17. The other radiation energy I0 is reflected by the surface of the substrate 1 to become radiation energy I''', and is converted by a detector 25 into an electrical quantity V''' through mirrors 19, 23. Then, oil film thickness (d) is calculated in an arithmetic unit 26, by a shown formula obtained from Lambert- Beer's low.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4905479A JPS55141604A (en) | 1979-04-23 | 1979-04-23 | Oil film thickness measuring apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4905479A JPS55141604A (en) | 1979-04-23 | 1979-04-23 | Oil film thickness measuring apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55141604A true JPS55141604A (en) | 1980-11-05 |
Family
ID=12820360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4905479A Pending JPS55141604A (en) | 1979-04-23 | 1979-04-23 | Oil film thickness measuring apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55141604A (en) |
-
1979
- 1979-04-23 JP JP4905479A patent/JPS55141604A/en active Pending
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