JPS55141604A - Oil film thickness measuring apparatus - Google Patents

Oil film thickness measuring apparatus

Info

Publication number
JPS55141604A
JPS55141604A JP4905479A JP4905479A JPS55141604A JP S55141604 A JPS55141604 A JP S55141604A JP 4905479 A JP4905479 A JP 4905479A JP 4905479 A JP4905479 A JP 4905479A JP S55141604 A JPS55141604 A JP S55141604A
Authority
JP
Japan
Prior art keywords
oil film
radiation energy
mirrors
film thickness
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4905479A
Other languages
Japanese (ja)
Inventor
Sadao Aizawa
Hachiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP4905479A priority Critical patent/JPS55141604A/en
Publication of JPS55141604A publication Critical patent/JPS55141604A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To enable to measure oil film thickness precisely, without being affected by environmental changes or fluctuations of light source, by providing light source, filter, detector of radiation energy reflected by the oil film and substrate surface, and arithmetic unit.
CONSTITUTION: Radiation energy released from a light source 11 is caused to enter an oil film 2 on a substrate 1 being measured, through reflecting mirrors 12, 13, filters 14, 15, modulator 16, half mirrors 17, 27, and reflecting mirrors 18, 20. One radiation energy I0 is reflected by the surface of the oil film 2 to become radiation energy I2, and is detected by a detector 24 as an electrical amount V2 through mirrors 20, 17. The other radiation energy I0 is reflected by the surface of the substrate 1 to become radiation energy I''', and is converted by a detector 25 into an electrical quantity V''' through mirrors 19, 23. Then, oil film thickness (d) is calculated in an arithmetic unit 26, by a shown formula obtained from Lambert- Beer's low.
COPYRIGHT: (C)1980,JPO&Japio
JP4905479A 1979-04-23 1979-04-23 Oil film thickness measuring apparatus Pending JPS55141604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4905479A JPS55141604A (en) 1979-04-23 1979-04-23 Oil film thickness measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4905479A JPS55141604A (en) 1979-04-23 1979-04-23 Oil film thickness measuring apparatus

Publications (1)

Publication Number Publication Date
JPS55141604A true JPS55141604A (en) 1980-11-05

Family

ID=12820360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4905479A Pending JPS55141604A (en) 1979-04-23 1979-04-23 Oil film thickness measuring apparatus

Country Status (1)

Country Link
JP (1) JPS55141604A (en)

Similar Documents

Publication Publication Date Title
JPS53110553A (en) Measurement apparatus of gradients of curved faces
JPS57139607A (en) Position measuring equipment
JPS533363A (en) Measurement method and measurement device
JPS55141604A (en) Oil film thickness measuring apparatus
JPS6435306A (en) Incidence angle determining method for refractive index and film thickness measurement
JPS56154604A (en) Measuring method and device for mesh image density or mesh area rate
JPS53107869A (en) Liquid fault detector
JPS5211953A (en) Optical system measuring device
JPS5724863A (en) Modulation measuring method of and apparatus for intensity of light
JPS52153468A (en) Thickness measuring method of substrates
JPS5328447A (en) Measurement of length of optical fiber and device therefor
JPS5342758A (en) Interference measuring method
JPS5263379A (en) Measurement of space filter speeds using coherent light
JPS5257843A (en) Measuring device for thickness of film
JPS52125387A (en) Surface flaw detecting method of hot steel materials
JPS5342881A (en) Measuring apparatus of leaked flowing amount
JPS5391772A (en) Measurement apparatus
JPS5381151A (en) Surface film thickness detector
JPS53117465A (en) Method and apparatus of measuring surface roughness
JPS5430865A (en) Surface shape measuring method
JPS52107857A (en) Film thickness measuring method
GB1482462A (en) Photographic testing method
JPS556813A (en) Crystal rating method of semiconductor surface layer
JPS54122139A (en) Mtf measuring apparatus
JPS5660309A (en) Measuring method for film thickness of thin film