JPS55138236A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS55138236A
JPS55138236A JP4510379A JP4510379A JPS55138236A JP S55138236 A JPS55138236 A JP S55138236A JP 4510379 A JP4510379 A JP 4510379A JP 4510379 A JP4510379 A JP 4510379A JP S55138236 A JPS55138236 A JP S55138236A
Authority
JP
Japan
Prior art keywords
hydrofluoric acid
substrate
semiconductor device
boiling point
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4510379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6161253B2 (enExample
Inventor
Motohiro Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4510379A priority Critical patent/JPS55138236A/ja
Publication of JPS55138236A publication Critical patent/JPS55138236A/ja
Publication of JPS6161253B2 publication Critical patent/JPS6161253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/00—

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP4510379A 1979-04-12 1979-04-12 Manufacture of semiconductor device Granted JPS55138236A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4510379A JPS55138236A (en) 1979-04-12 1979-04-12 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4510379A JPS55138236A (en) 1979-04-12 1979-04-12 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55138236A true JPS55138236A (en) 1980-10-28
JPS6161253B2 JPS6161253B2 (enExample) 1986-12-24

Family

ID=12709945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4510379A Granted JPS55138236A (en) 1979-04-12 1979-04-12 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55138236A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252140A (ja) * 1986-04-25 1987-11-02 Nippon Mining Co Ltd ＩｎＰウエ−ハの洗浄方法
US5098866A (en) * 1988-12-27 1992-03-24 Texas Instruments Incorporated Method for reducing hot-electron-induced degradation of device characteristics

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH688345A5 (de) * 1994-04-06 1997-08-15 Fischer Artur Werke Gmbh Aufbewahrungsvorrichtung fuer Regenschirme zum Einbau in Kraftfahrzeugen.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252140A (ja) * 1986-04-25 1987-11-02 Nippon Mining Co Ltd ＩｎＰウエ−ハの洗浄方法
US5098866A (en) * 1988-12-27 1992-03-24 Texas Instruments Incorporated Method for reducing hot-electron-induced degradation of device characteristics

Also Published As

Publication number Publication date
JPS6161253B2 (enExample) 1986-12-24

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