JPS55138236A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS55138236A JPS55138236A JP4510379A JP4510379A JPS55138236A JP S55138236 A JPS55138236 A JP S55138236A JP 4510379 A JP4510379 A JP 4510379A JP 4510379 A JP4510379 A JP 4510379A JP S55138236 A JPS55138236 A JP S55138236A
- Authority
- JP
- Japan
- Prior art keywords
- hydrofluoric acid
- substrate
- semiconductor device
- boiling point
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 13
- 239000000758 substrate Substances 0.000 abstract 5
- 238000009835 boiling Methods 0.000 abstract 3
- 238000001035 drying Methods 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000012423 maintenance Methods 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4510379A JPS55138236A (en) | 1979-04-12 | 1979-04-12 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4510379A JPS55138236A (en) | 1979-04-12 | 1979-04-12 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55138236A true JPS55138236A (en) | 1980-10-28 |
JPS6161253B2 JPS6161253B2 (ja) | 1986-12-24 |
Family
ID=12709945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4510379A Granted JPS55138236A (en) | 1979-04-12 | 1979-04-12 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55138236A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62252140A (ja) * | 1986-04-25 | 1987-11-02 | Nippon Mining Co Ltd | InPウエ−ハの洗浄方法 |
US5098866A (en) * | 1988-12-27 | 1992-03-24 | Texas Instruments Incorporated | Method for reducing hot-electron-induced degradation of device characteristics |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH688345A5 (de) * | 1994-04-06 | 1997-08-15 | Fischer Artur Werke Gmbh | Aufbewahrungsvorrichtung fuer Regenschirme zum Einbau in Kraftfahrzeugen. |
-
1979
- 1979-04-12 JP JP4510379A patent/JPS55138236A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62252140A (ja) * | 1986-04-25 | 1987-11-02 | Nippon Mining Co Ltd | InPウエ−ハの洗浄方法 |
US5098866A (en) * | 1988-12-27 | 1992-03-24 | Texas Instruments Incorporated | Method for reducing hot-electron-induced degradation of device characteristics |
Also Published As
Publication number | Publication date |
---|---|
JPS6161253B2 (ja) | 1986-12-24 |
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