JPS546476A - Manufacture for schottky barrier field effect transistor - Google Patents
Manufacture for schottky barrier field effect transistorInfo
- Publication number
- JPS546476A JPS546476A JP7259577A JP7259577A JPS546476A JP S546476 A JPS546476 A JP S546476A JP 7259577 A JP7259577 A JP 7259577A JP 7259577 A JP7259577 A JP 7259577A JP S546476 A JPS546476 A JP S546476A
- Authority
- JP
- Japan
- Prior art keywords
- schottky barrier
- manufacture
- field effect
- effect transistor
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To extremely reduce the electrode distance and to increase the oscillated frequency, by growing epitaxial layer on a semi-insulation semiconductor substrate, providing a schottky barrier metallic layer on it, shallowering the opitaxial layer not covered with the metallic layer with etching and producing step, and providing ohmic electrodes on the metallic layer and the epitaxial layer respectively.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7259577A JPS546476A (en) | 1977-06-16 | 1977-06-16 | Manufacture for schottky barrier field effect transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7259577A JPS546476A (en) | 1977-06-16 | 1977-06-16 | Manufacture for schottky barrier field effect transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS546476A true JPS546476A (en) | 1979-01-18 |
Family
ID=13493901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7259577A Pending JPS546476A (en) | 1977-06-16 | 1977-06-16 | Manufacture for schottky barrier field effect transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS546476A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6031225A (en) * | 1983-08-01 | 1985-02-18 | Nippon Telegr & Teleph Corp <Ntt> | Charged beam exposure device |
-
1977
- 1977-06-16 JP JP7259577A patent/JPS546476A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6031225A (en) * | 1983-08-01 | 1985-02-18 | Nippon Telegr & Teleph Corp <Ntt> | Charged beam exposure device |
JPH0542808B2 (en) * | 1983-08-01 | 1993-06-29 | Nippon Telegraph & Telephone |
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