JPS5461491A - Forming method of electrode wiring - Google Patents
Forming method of electrode wiringInfo
- Publication number
- JPS5461491A JPS5461491A JP12750677A JP12750677A JPS5461491A JP S5461491 A JPS5461491 A JP S5461491A JP 12750677 A JP12750677 A JP 12750677A JP 12750677 A JP12750677 A JP 12750677A JP S5461491 A JPS5461491 A JP S5461491A
- Authority
- JP
- Japan
- Prior art keywords
- electrode wiring
- wiring
- electrode
- forming method
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To enable flat wiring and multi-layer constitution, by implanting the electrode wiring to the grooves of the electrode wiring pattern shape, in the electrode wiring forming method providing electrode and wiring on the semiconductor substrate with planer technology.
CONSTITUTION: The silicon nitride film 13 is formed on the substrate by utilizing plasma discharge, the photo resist mask 14 is formed on it, and the silicon nitride film 13 for the uaeart not forming the mask 14 is etched by utilizing plasma discharge, forming the grooves 15,16,17 of the electrode wiring pattern, and wiring metal matrial is evaporated on the entire surface and the photo resist is removed by melting
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12750677A JPS5461491A (en) | 1977-10-26 | 1977-10-26 | Forming method of electrode wiring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12750677A JPS5461491A (en) | 1977-10-26 | 1977-10-26 | Forming method of electrode wiring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5461491A true JPS5461491A (en) | 1979-05-17 |
Family
ID=14961665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12750677A Pending JPS5461491A (en) | 1977-10-26 | 1977-10-26 | Forming method of electrode wiring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5461491A (en) |
-
1977
- 1977-10-26 JP JP12750677A patent/JPS5461491A/en active Pending
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