JPS5453874A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5453874A
JPS5453874A JP11945277A JP11945277A JPS5453874A JP S5453874 A JPS5453874 A JP S5453874A JP 11945277 A JP11945277 A JP 11945277A JP 11945277 A JP11945277 A JP 11945277A JP S5453874 A JPS5453874 A JP S5453874A
Authority
JP
Japan
Prior art keywords
resistance
resistor
element part
type
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11945277A
Other languages
English (en)
Inventor
Kazuo Terakawa
Kenro Sakagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11945277A priority Critical patent/JPS5453874A/ja
Publication of JPS5453874A publication Critical patent/JPS5453874A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP11945277A 1977-10-06 1977-10-06 Production of semiconductor device Pending JPS5453874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11945277A JPS5453874A (en) 1977-10-06 1977-10-06 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11945277A JPS5453874A (en) 1977-10-06 1977-10-06 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5453874A true JPS5453874A (en) 1979-04-27

Family

ID=14761727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11945277A Pending JPS5453874A (en) 1977-10-06 1977-10-06 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5453874A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58164135A (ja) * 1982-03-25 1983-09-29 Agency Of Ind Science & Technol 収束イオンビ−ムを用いた半導体加工装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58164135A (ja) * 1982-03-25 1983-09-29 Agency Of Ind Science & Technol 収束イオンビ−ムを用いた半導体加工装置
JPS6352429B2 (ja) * 1982-03-25 1988-10-19 Kogyo Gijutsuin

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