JPS5419382A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5419382A JPS5419382A JP8484077A JP8484077A JPS5419382A JP S5419382 A JPS5419382 A JP S5419382A JP 8484077 A JP8484077 A JP 8484077A JP 8484077 A JP8484077 A JP 8484077A JP S5419382 A JPS5419382 A JP S5419382A
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor device
- insulating film
- superpose
- align
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To superpose a first Si film a second insulating film, a second Si film on the insulating film of a substrate, open holes in the second Si film, align the opening side faces and part of the second insulating film, provide a metal film through the openings and connect the first and second Si layers.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8484077A JPS5419382A (en) | 1977-07-14 | 1977-07-14 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8484077A JPS5419382A (en) | 1977-07-14 | 1977-07-14 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5419382A true JPS5419382A (en) | 1979-02-14 |
JPS6142861B2 JPS6142861B2 (en) | 1986-09-24 |
Family
ID=13841979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8484077A Granted JPS5419382A (en) | 1977-07-14 | 1977-07-14 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5419382A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57183051A (en) * | 1981-05-06 | 1982-11-11 | Seiko Epson Corp | Wiring in semiconductor device |
JPS5842257A (en) * | 1981-09-07 | 1983-03-11 | Toshiba Corp | Semiconductor device |
JPS63182838A (en) * | 1987-01-26 | 1988-07-28 | Seiko Instr & Electronics Ltd | Manufacture of semiconductor device |
-
1977
- 1977-07-14 JP JP8484077A patent/JPS5419382A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57183051A (en) * | 1981-05-06 | 1982-11-11 | Seiko Epson Corp | Wiring in semiconductor device |
JPS637465B2 (en) * | 1981-05-06 | 1988-02-17 | Seiko Epson Corp | |
JPS5842257A (en) * | 1981-09-07 | 1983-03-11 | Toshiba Corp | Semiconductor device |
JPS63182838A (en) * | 1987-01-26 | 1988-07-28 | Seiko Instr & Electronics Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6142861B2 (en) | 1986-09-24 |
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