JPS5419382A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5419382A
JPS5419382A JP8484077A JP8484077A JPS5419382A JP S5419382 A JPS5419382 A JP S5419382A JP 8484077 A JP8484077 A JP 8484077A JP 8484077 A JP8484077 A JP 8484077A JP S5419382 A JPS5419382 A JP S5419382A
Authority
JP
Japan
Prior art keywords
film
semiconductor device
insulating film
superpose
align
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8484077A
Other languages
Japanese (ja)
Other versions
JPS6142861B2 (en
Inventor
Kunio Aomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8484077A priority Critical patent/JPS5419382A/en
Publication of JPS5419382A publication Critical patent/JPS5419382A/en
Publication of JPS6142861B2 publication Critical patent/JPS6142861B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To superpose a first Si film a second insulating film, a second Si film on the insulating film of a substrate, open holes in the second Si film, align the opening side faces and part of the second insulating film, provide a metal film through the openings and connect the first and second Si layers.
COPYRIGHT: (C)1979,JPO&Japio
JP8484077A 1977-07-14 1977-07-14 Semiconductor device Granted JPS5419382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8484077A JPS5419382A (en) 1977-07-14 1977-07-14 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8484077A JPS5419382A (en) 1977-07-14 1977-07-14 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5419382A true JPS5419382A (en) 1979-02-14
JPS6142861B2 JPS6142861B2 (en) 1986-09-24

Family

ID=13841979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8484077A Granted JPS5419382A (en) 1977-07-14 1977-07-14 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5419382A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57183051A (en) * 1981-05-06 1982-11-11 Seiko Epson Corp Wiring in semiconductor device
JPS5842257A (en) * 1981-09-07 1983-03-11 Toshiba Corp Semiconductor device
JPS63182838A (en) * 1987-01-26 1988-07-28 Seiko Instr & Electronics Ltd Manufacture of semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57183051A (en) * 1981-05-06 1982-11-11 Seiko Epson Corp Wiring in semiconductor device
JPS637465B2 (en) * 1981-05-06 1988-02-17 Seiko Epson Corp
JPS5842257A (en) * 1981-09-07 1983-03-11 Toshiba Corp Semiconductor device
JPS63182838A (en) * 1987-01-26 1988-07-28 Seiko Instr & Electronics Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS6142861B2 (en) 1986-09-24

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