JPS5295980A - Mask fitting device of semiconductor substrate - Google Patents

Mask fitting device of semiconductor substrate

Info

Publication number
JPS5295980A
JPS5295980A JP1267576A JP1267576A JPS5295980A JP S5295980 A JPS5295980 A JP S5295980A JP 1267576 A JP1267576 A JP 1267576A JP 1267576 A JP1267576 A JP 1267576A JP S5295980 A JPS5295980 A JP S5295980A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
fitting device
mask fitting
openings
pressure source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1267576A
Other languages
Japanese (ja)
Inventor
Takami Sakota
Hidenori Seki
Kuniya Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1267576A priority Critical patent/JPS5295980A/en
Publication of JPS5295980A publication Critical patent/JPS5295980A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To prevent contamination of a substrate by providing an openings in the substrate mount and connecting one of the openings to low pressure source through a filter and connecting the other opening to high pressure source.
COPYRIGHT: (C)1977,JPO&Japio
JP1267576A 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate Pending JPS5295980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267576A JPS5295980A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267576A JPS5295980A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5295980A true JPS5295980A (en) 1977-08-12

Family

ID=11811938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267576A Pending JPS5295980A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5295980A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61252630A (en) * 1985-05-02 1986-11-10 Hitachi Electronics Eng Co Ltd Aligning method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61252630A (en) * 1985-05-02 1986-11-10 Hitachi Electronics Eng Co Ltd Aligning method

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