JPS5295979A - Mask fitting device of semiconductor substrate - Google Patents
Mask fitting device of semiconductor substrateInfo
- Publication number
- JPS5295979A JPS5295979A JP1267476A JP1267476A JPS5295979A JP S5295979 A JPS5295979 A JP S5295979A JP 1267476 A JP1267476 A JP 1267476A JP 1267476 A JP1267476 A JP 1267476A JP S5295979 A JPS5295979 A JP S5295979A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- fitting device
- hole
- mask fitting
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To prevent contamination of substrate by providing a hole for adsorbing the substrate and a hole for detaching on the substrate mount and connecting the hole for adsorbing to a pressure reducing source through a filter directly attached to the mount and connecting the hole for adsorbing to a high pressure source.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1267476A JPS5295979A (en) | 1976-02-07 | 1976-02-07 | Mask fitting device of semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1267476A JPS5295979A (en) | 1976-02-07 | 1976-02-07 | Mask fitting device of semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5295979A true JPS5295979A (en) | 1977-08-12 |
Family
ID=11811909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1267476A Pending JPS5295979A (en) | 1976-02-07 | 1976-02-07 | Mask fitting device of semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5295979A (en) |
-
1976
- 1976-02-07 JP JP1267476A patent/JPS5295979A/en active Pending
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