JPS5295979A - Mask fitting device of semiconductor substrate - Google Patents

Mask fitting device of semiconductor substrate

Info

Publication number
JPS5295979A
JPS5295979A JP1267476A JP1267476A JPS5295979A JP S5295979 A JPS5295979 A JP S5295979A JP 1267476 A JP1267476 A JP 1267476A JP 1267476 A JP1267476 A JP 1267476A JP S5295979 A JPS5295979 A JP S5295979A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
fitting device
hole
mask fitting
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1267476A
Other languages
Japanese (ja)
Inventor
Takami Sakota
Hidenori Seki
Kuniya Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1267476A priority Critical patent/JPS5295979A/en
Publication of JPS5295979A publication Critical patent/JPS5295979A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To prevent contamination of substrate by providing a hole for adsorbing the substrate and a hole for detaching on the substrate mount and connecting the hole for adsorbing to a pressure reducing source through a filter directly attached to the mount and connecting the hole for adsorbing to a high pressure source.
COPYRIGHT: (C)1977,JPO&Japio
JP1267476A 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate Pending JPS5295979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267476A JPS5295979A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267476A JPS5295979A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5295979A true JPS5295979A (en) 1977-08-12

Family

ID=11811909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267476A Pending JPS5295979A (en) 1976-02-07 1976-02-07 Mask fitting device of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5295979A (en)

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