JPS52126171A - X-ray exposing process for semiconductor substrate - Google Patents
X-ray exposing process for semiconductor substrateInfo
- Publication number
- JPS52126171A JPS52126171A JP4189776A JP4189776A JPS52126171A JP S52126171 A JPS52126171 A JP S52126171A JP 4189776 A JP4189776 A JP 4189776A JP 4189776 A JP4189776 A JP 4189776A JP S52126171 A JPS52126171 A JP S52126171A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- exposing process
- ray exposing
- air
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE:To avoid troubles due to the remaining air by removing simultaneously air between a mask and a semiconductor substrate when removing air from the circumferences of the mask and semiconductor substrates.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4189776A JPS52126171A (en) | 1976-04-15 | 1976-04-15 | X-ray exposing process for semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4189776A JPS52126171A (en) | 1976-04-15 | 1976-04-15 | X-ray exposing process for semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52126171A true JPS52126171A (en) | 1977-10-22 |
Family
ID=12621065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4189776A Pending JPS52126171A (en) | 1976-04-15 | 1976-04-15 | X-ray exposing process for semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52126171A (en) |
-
1976
- 1976-04-15 JP JP4189776A patent/JPS52126171A/en active Pending
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Effective date: 20040511 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20040406 |
|
A313 | Final decision of rejection without a dissenting response from the applicant |
Effective date: 20040927 Free format text: JAPANESE INTERMEDIATE CODE: A313 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20041102 |