JPS5318963A - Scrub-cleaning device for masks - Google Patents

Scrub-cleaning device for masks

Info

Publication number
JPS5318963A
JPS5318963A JP9320276A JP9320276A JPS5318963A JP S5318963 A JPS5318963 A JP S5318963A JP 9320276 A JP9320276 A JP 9320276A JP 9320276 A JP9320276 A JP 9320276A JP S5318963 A JPS5318963 A JP S5318963A
Authority
JP
Japan
Prior art keywords
scrub
masks
cleaning device
cleaning
turningover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9320276A
Other languages
Japanese (ja)
Other versions
JPS6037463B2 (en
Inventor
Itaru Donomae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51093202A priority Critical patent/JPS6037463B2/en
Publication of JPS5318963A publication Critical patent/JPS5318963A/en
Publication of JPS6037463B2 publication Critical patent/JPS6037463B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning In General (AREA)

Abstract

PURPOSE: Scrub-cleaning is performed by making possible suction holding, turningover and mounting without touching the pattern area of masks.
COPYRIGHT: (C)1978,JPO&Japio
JP51093202A 1976-08-06 1976-08-06 Mask scrub cleaning device Expired JPS6037463B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51093202A JPS6037463B2 (en) 1976-08-06 1976-08-06 Mask scrub cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51093202A JPS6037463B2 (en) 1976-08-06 1976-08-06 Mask scrub cleaning device

Publications (2)

Publication Number Publication Date
JPS5318963A true JPS5318963A (en) 1978-02-21
JPS6037463B2 JPS6037463B2 (en) 1985-08-26

Family

ID=14075977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51093202A Expired JPS6037463B2 (en) 1976-08-06 1976-08-06 Mask scrub cleaning device

Country Status (1)

Country Link
JP (1) JPS6037463B2 (en)

Also Published As

Publication number Publication date
JPS6037463B2 (en) 1985-08-26

Similar Documents

Publication Publication Date Title
JPS51120180A (en) Pattern printing device
JPS5318963A (en) Scrub-cleaning device for masks
JPS5318540A (en) Alpha-chloroacetamides and their use
JPS5277670A (en) Semiconductive device
JPS5435681A (en) Alignment device
JPS546333A (en) Structure of holding panel
JPS534648A (en) Apparatus for facial treatment
JPS522951A (en) Thumb and arm of industrial robbot
JPS5230047A (en) Bubble breaking method
JPS5419367A (en) Production of semiconductor device
JPS549273A (en) 7-arginylamono-4-methylcoumarin
JPS51112279A (en) Semiconductor device
JPS52118453A (en) Indene derivatives
JPS51131964A (en) Filter device
JPS5291880A (en) 3-acyl-5-fluorouracil
JPS51142748A (en) Local cleaning device
JPS5429978A (en) Carrier device for semiconductor wafer and mask
JPS5240285A (en) Multiple operation instrument
JPS53120272A (en) Manufacture of semiconductor device
JPS52118487A (en) Isotentoxin and method of preparing the same
JPS5345975A (en) Mask for exposure
JPS51113423A (en) Pattern input device
JPS5425173A (en) Manufacture for semiconductor device
JPS5227275A (en) Glass mask holder
JPS51120855A (en) Hair treating device