JPS54112171A - Semiconductor device and its manufacture - Google Patents
Semiconductor device and its manufactureInfo
- Publication number
- JPS54112171A JPS54112171A JP2011478A JP2011478A JPS54112171A JP S54112171 A JPS54112171 A JP S54112171A JP 2011478 A JP2011478 A JP 2011478A JP 2011478 A JP2011478 A JP 2011478A JP S54112171 A JPS54112171 A JP S54112171A
- Authority
- JP
- Japan
- Prior art keywords
- film
- junction
- photoetching
- photo resist
- powder mixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To stabilize operation characteristics at a high temperature, and also to improve corrosion resistance of a protective film, by stacking and adhering 1st and 2nd glass films, which contain zinc oxide and lead oxide respectively, to the PN- junction exposure surface of a semiconductor substrate.
CONSTITUTION: In P-type Si substrate 1, N-type region 2 is formed by diffusion to make PN junction 3, and onto the entire surface including this, a photo resist with zinc glass powder mixed is rotation-applied by a spinner method and dried to form mixture film 5. While this film 5 is left only on the surface where junction 3 is exposed, the other is removed by photoetching and photo resist mixture film 6 with lead glass powder mixed is adhered to the entire surface including film 5 left. At this time, baking temperatures and thermal expansion coefficient of those films 5 and 6 are made close. Then, photoetching is carried out with film 6 made to remain only on film 5, and the lamination film of them is formed only on the exposure surface of junction 3. In this way, protection is effective against impurity ions by film 5 and against chemicals by film 6.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011478A JPS54112171A (en) | 1978-02-22 | 1978-02-22 | Semiconductor device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011478A JPS54112171A (en) | 1978-02-22 | 1978-02-22 | Semiconductor device and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54112171A true JPS54112171A (en) | 1979-09-01 |
Family
ID=12018085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011478A Pending JPS54112171A (en) | 1978-02-22 | 1978-02-22 | Semiconductor device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54112171A (en) |
-
1978
- 1978-02-22 JP JP2011478A patent/JPS54112171A/en active Pending
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