JPS54102980A - Mos-type semiconductor device and its manufacture - Google Patents
Mos-type semiconductor device and its manufactureInfo
- Publication number
- JPS54102980A JPS54102980A JP1011378A JP1011378A JPS54102980A JP S54102980 A JPS54102980 A JP S54102980A JP 1011378 A JP1011378 A JP 1011378A JP 1011378 A JP1011378 A JP 1011378A JP S54102980 A JPS54102980 A JP S54102980A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- concavity
- substrate
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1011378A JPS54102980A (en) | 1978-01-31 | 1978-01-31 | Mos-type semiconductor device and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1011378A JPS54102980A (en) | 1978-01-31 | 1978-01-31 | Mos-type semiconductor device and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54102980A true JPS54102980A (en) | 1979-08-13 |
Family
ID=11741250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1011378A Pending JPS54102980A (en) | 1978-01-31 | 1978-01-31 | Mos-type semiconductor device and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54102980A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5999771A (ja) * | 1982-11-29 | 1984-06-08 | Nec Corp | Mos型半導体装置及びその製造方法 |
US5235204A (en) * | 1990-08-27 | 1993-08-10 | Taiwan Semiconductor Manufacturing Company | Reverse self-aligned transistor integrated circuit |
US5300447A (en) * | 1992-09-29 | 1994-04-05 | Texas Instruments Incorporated | Method of manufacturing a minimum scaled transistor |
-
1978
- 1978-01-31 JP JP1011378A patent/JPS54102980A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5999771A (ja) * | 1982-11-29 | 1984-06-08 | Nec Corp | Mos型半導体装置及びその製造方法 |
US5235204A (en) * | 1990-08-27 | 1993-08-10 | Taiwan Semiconductor Manufacturing Company | Reverse self-aligned transistor integrated circuit |
US5300447A (en) * | 1992-09-29 | 1994-04-05 | Texas Instruments Incorporated | Method of manufacturing a minimum scaled transistor |
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