JPS54101663A - Aluminum diffusion method - Google Patents
Aluminum diffusion methodInfo
- Publication number
- JPS54101663A JPS54101663A JP874778A JP874778A JPS54101663A JP S54101663 A JPS54101663 A JP S54101663A JP 874778 A JP874778 A JP 874778A JP 874778 A JP874778 A JP 874778A JP S54101663 A JPS54101663 A JP S54101663A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- film
- forming
- resistor
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP874778A JPS54101663A (en) | 1978-01-27 | 1978-01-27 | Aluminum diffusion method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP874778A JPS54101663A (en) | 1978-01-27 | 1978-01-27 | Aluminum diffusion method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54101663A true JPS54101663A (en) | 1979-08-10 |
Family
ID=11701518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP874778A Pending JPS54101663A (en) | 1978-01-27 | 1978-01-27 | Aluminum diffusion method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54101663A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5300462A (en) * | 1989-02-20 | 1994-04-05 | Kabushiki Kaisha Toshiba | Method for forming a sputtered metal film |
KR100345174B1 (ko) * | 1999-04-14 | 2002-07-24 | 가부시키가이샤 무라타 세이사쿠쇼 | 적외선 센서 및 이의 제조방법 |
-
1978
- 1978-01-27 JP JP874778A patent/JPS54101663A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5300462A (en) * | 1989-02-20 | 1994-04-05 | Kabushiki Kaisha Toshiba | Method for forming a sputtered metal film |
KR100345174B1 (ko) * | 1999-04-14 | 2002-07-24 | 가부시키가이샤 무라타 세이사쿠쇼 | 적외선 센서 및 이의 제조방법 |
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