JPS5377478A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5377478A
JPS5377478A JP15461176A JP15461176A JPS5377478A JP S5377478 A JPS5377478 A JP S5377478A JP 15461176 A JP15461176 A JP 15461176A JP 15461176 A JP15461176 A JP 15461176A JP S5377478 A JPS5377478 A JP S5377478A
Authority
JP
Japan
Prior art keywords
semiconductor device
epi
photomask
pit
projections
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15461176A
Other languages
Japanese (ja)
Other versions
JPS6028388B2 (en
Inventor
Teruo Iino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15461176A priority Critical patent/JPS6028388B2/en
Publication of JPS5377478A publication Critical patent/JPS5377478A/en
Publication of JPS6028388B2 publication Critical patent/JPS6028388B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To improve yield with avoiding a crystal defect and a damage of the photomask dependent upon projections such as a mount and a pit on the epi-layer surface by forming all the elements such as the transistor and the resistance on the other face of the epitaxially grown semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP15461176A 1976-12-21 1976-12-21 Manufacturing method of semiconductor device Expired JPS6028388B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15461176A JPS6028388B2 (en) 1976-12-21 1976-12-21 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15461176A JPS6028388B2 (en) 1976-12-21 1976-12-21 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5377478A true JPS5377478A (en) 1978-07-08
JPS6028388B2 JPS6028388B2 (en) 1985-07-04

Family

ID=15587959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15461176A Expired JPS6028388B2 (en) 1976-12-21 1976-12-21 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6028388B2 (en)

Also Published As

Publication number Publication date
JPS6028388B2 (en) 1985-07-04

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