JPS5377478A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5377478A JPS5377478A JP15461176A JP15461176A JPS5377478A JP S5377478 A JPS5377478 A JP S5377478A JP 15461176 A JP15461176 A JP 15461176A JP 15461176 A JP15461176 A JP 15461176A JP S5377478 A JPS5377478 A JP S5377478A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- epi
- photomask
- pit
- projections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To improve yield with avoiding a crystal defect and a damage of the photomask dependent upon projections such as a mount and a pit on the epi-layer surface by forming all the elements such as the transistor and the resistance on the other face of the epitaxially grown semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15461176A JPS6028388B2 (en) | 1976-12-21 | 1976-12-21 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15461176A JPS6028388B2 (en) | 1976-12-21 | 1976-12-21 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5377478A true JPS5377478A (en) | 1978-07-08 |
JPS6028388B2 JPS6028388B2 (en) | 1985-07-04 |
Family
ID=15587959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15461176A Expired JPS6028388B2 (en) | 1976-12-21 | 1976-12-21 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6028388B2 (en) |
-
1976
- 1976-12-21 JP JP15461176A patent/JPS6028388B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6028388B2 (en) | 1985-07-04 |
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