JPS5377176A - Pattern forming method - Google Patents

Pattern forming method

Info

Publication number
JPS5377176A
JPS5377176A JP15319076A JP15319076A JPS5377176A JP S5377176 A JPS5377176 A JP S5377176A JP 15319076 A JP15319076 A JP 15319076A JP 15319076 A JP15319076 A JP 15319076A JP S5377176 A JPS5377176 A JP S5377176A
Authority
JP
Japan
Prior art keywords
forming method
pattern forming
light
high speed
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15319076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5343015B2 (enExample
Inventor
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15319076A priority Critical patent/JPS5377176A/ja
Publication of JPS5377176A publication Critical patent/JPS5377176A/ja
Publication of JPS5343015B2 publication Critical patent/JPS5343015B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP15319076A 1976-12-20 1976-12-20 Pattern forming method Granted JPS5377176A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15319076A JPS5377176A (en) 1976-12-20 1976-12-20 Pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15319076A JPS5377176A (en) 1976-12-20 1976-12-20 Pattern forming method

Publications (2)

Publication Number Publication Date
JPS5377176A true JPS5377176A (en) 1978-07-08
JPS5343015B2 JPS5343015B2 (enExample) 1978-11-16

Family

ID=15557004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15319076A Granted JPS5377176A (en) 1976-12-20 1976-12-20 Pattern forming method

Country Status (1)

Country Link
JP (1) JPS5377176A (enExample)

Also Published As

Publication number Publication date
JPS5343015B2 (enExample) 1978-11-16

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