JPS5376781A - Production of piezoelectric substarate for elastic surface waves - Google Patents

Production of piezoelectric substarate for elastic surface waves

Info

Publication number
JPS5376781A
JPS5376781A JP15193676A JP15193676A JPS5376781A JP S5376781 A JPS5376781 A JP S5376781A JP 15193676 A JP15193676 A JP 15193676A JP 15193676 A JP15193676 A JP 15193676A JP S5376781 A JPS5376781 A JP S5376781A
Authority
JP
Japan
Prior art keywords
substarate
piezoelectric
production
surface waves
elastic surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15193676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5633873B2 (OSRAM
Inventor
Masao Mashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15193676A priority Critical patent/JPS5376781A/ja
Publication of JPS5376781A publication Critical patent/JPS5376781A/ja
Publication of JPS5633873B2 publication Critical patent/JPS5633873B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP15193676A 1976-12-20 1976-12-20 Production of piezoelectric substarate for elastic surface waves Granted JPS5376781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15193676A JPS5376781A (en) 1976-12-20 1976-12-20 Production of piezoelectric substarate for elastic surface waves

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15193676A JPS5376781A (en) 1976-12-20 1976-12-20 Production of piezoelectric substarate for elastic surface waves

Publications (2)

Publication Number Publication Date
JPS5376781A true JPS5376781A (en) 1978-07-07
JPS5633873B2 JPS5633873B2 (OSRAM) 1981-08-06

Family

ID=15529430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15193676A Granted JPS5376781A (en) 1976-12-20 1976-12-20 Production of piezoelectric substarate for elastic surface waves

Country Status (1)

Country Link
JP (1) JPS5376781A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08321445A (ja) * 1995-05-25 1996-12-03 Sumitomo Electric Ind Ltd マイクロデバイス基板およびマイクロデバイス基板の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08321445A (ja) * 1995-05-25 1996-12-03 Sumitomo Electric Ind Ltd マイクロデバイス基板およびマイクロデバイス基板の製造方法

Also Published As

Publication number Publication date
JPS5633873B2 (OSRAM) 1981-08-06

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