JPS5374376A - Formation method of micropattern - Google Patents

Formation method of micropattern

Info

Publication number
JPS5374376A
JPS5374376A JP15118176A JP15118176A JPS5374376A JP S5374376 A JPS5374376 A JP S5374376A JP 15118176 A JP15118176 A JP 15118176A JP 15118176 A JP15118176 A JP 15118176A JP S5374376 A JPS5374376 A JP S5374376A
Authority
JP
Japan
Prior art keywords
mask
micropattern
formation method
nearly
restrain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15118176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS614178B2 (OSRAM
Inventor
Koichi Kobayashi
Shigeru Furuya
Akira Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15118176A priority Critical patent/JPS5374376A/ja
Publication of JPS5374376A publication Critical patent/JPS5374376A/ja
Publication of JPS614178B2 publication Critical patent/JPS614178B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP15118176A 1976-12-15 1976-12-15 Formation method of micropattern Granted JPS5374376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15118176A JPS5374376A (en) 1976-12-15 1976-12-15 Formation method of micropattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15118176A JPS5374376A (en) 1976-12-15 1976-12-15 Formation method of micropattern

Publications (2)

Publication Number Publication Date
JPS5374376A true JPS5374376A (en) 1978-07-01
JPS614178B2 JPS614178B2 (OSRAM) 1986-02-07

Family

ID=15513057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15118176A Granted JPS5374376A (en) 1976-12-15 1976-12-15 Formation method of micropattern

Country Status (1)

Country Link
JP (1) JPS5374376A (OSRAM)

Also Published As

Publication number Publication date
JPS614178B2 (OSRAM) 1986-02-07

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