JPS5362474A - Cleaning method of metal photo mask - Google Patents
Cleaning method of metal photo maskInfo
- Publication number
- JPS5362474A JPS5362474A JP13730576A JP13730576A JPS5362474A JP S5362474 A JPS5362474 A JP S5362474A JP 13730576 A JP13730576 A JP 13730576A JP 13730576 A JP13730576 A JP 13730576A JP S5362474 A JPS5362474 A JP S5362474A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning method
- photo mask
- metal photo
- mask
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13730576A JPS5362474A (en) | 1976-11-17 | 1976-11-17 | Cleaning method of metal photo mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13730576A JPS5362474A (en) | 1976-11-17 | 1976-11-17 | Cleaning method of metal photo mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5362474A true JPS5362474A (en) | 1978-06-03 |
Family
ID=15195570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13730576A Pending JPS5362474A (en) | 1976-11-17 | 1976-11-17 | Cleaning method of metal photo mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5362474A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5687325A (en) * | 1979-12-19 | 1981-07-15 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device |
JPS5779625A (en) * | 1980-11-05 | 1982-05-18 | Sanyo Electric Co Ltd | Gettering of silicon wafer |
JPS5858874A (ja) * | 1981-10-02 | 1983-04-07 | Hitachi Lighting Ltd | トランジスタインバ−タ |
JPS5896412A (ja) * | 1981-12-04 | 1983-06-08 | Fujitsu Ltd | 圧電振動子の製造方法 |
US4629661A (en) * | 1982-09-15 | 1986-12-16 | Santrade Limited | Cutting insert and method of making the same |
-
1976
- 1976-11-17 JP JP13730576A patent/JPS5362474A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5687325A (en) * | 1979-12-19 | 1981-07-15 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device |
JPH0135496B2 (ja) * | 1979-12-19 | 1989-07-25 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai | |
JPS5779625A (en) * | 1980-11-05 | 1982-05-18 | Sanyo Electric Co Ltd | Gettering of silicon wafer |
JPS5858874A (ja) * | 1981-10-02 | 1983-04-07 | Hitachi Lighting Ltd | トランジスタインバ−タ |
JPS5896412A (ja) * | 1981-12-04 | 1983-06-08 | Fujitsu Ltd | 圧電振動子の製造方法 |
US4629661A (en) * | 1982-09-15 | 1986-12-16 | Santrade Limited | Cutting insert and method of making the same |
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