JPS5222598A - Etching method of chromium oxide - Google Patents

Etching method of chromium oxide

Info

Publication number
JPS5222598A
JPS5222598A JP9898675A JP9898675A JPS5222598A JP S5222598 A JPS5222598 A JP S5222598A JP 9898675 A JP9898675 A JP 9898675A JP 9898675 A JP9898675 A JP 9898675A JP S5222598 A JPS5222598 A JP S5222598A
Authority
JP
Japan
Prior art keywords
etching method
chromium oxide
etching
nega
quantitatively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9898675A
Other languages
Japanese (ja)
Other versions
JPS532840B2 (en
Inventor
Kyusaku Nishioka
Haruhiko Abe
Teruhiko Yamazaki
Ikuo Iwama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9898675A priority Critical patent/JPS5222598A/en
Publication of JPS5222598A publication Critical patent/JPS5222598A/en
Publication of JPS532840B2 publication Critical patent/JPS532840B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To reverse posi-nega pattern and to remove the masking film in the etching process, and to control the etching depth quantitatively and uniformly.
COPYRIGHT: (C)1977,JPO&Japio
JP9898675A 1975-08-14 1975-08-14 Etching method of chromium oxide Granted JPS5222598A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9898675A JPS5222598A (en) 1975-08-14 1975-08-14 Etching method of chromium oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9898675A JPS5222598A (en) 1975-08-14 1975-08-14 Etching method of chromium oxide

Publications (2)

Publication Number Publication Date
JPS5222598A true JPS5222598A (en) 1977-02-19
JPS532840B2 JPS532840B2 (en) 1978-02-01

Family

ID=14234309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9898675A Granted JPS5222598A (en) 1975-08-14 1975-08-14 Etching method of chromium oxide

Country Status (1)

Country Link
JP (1) JPS5222598A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112701U (en) * 1983-12-22 1984-07-30 湯山　正二 Quantitative dividing device for powder and granular materials in a packaging machine
US4649099A (en) * 1981-10-09 1987-03-10 Dai Nippon Insatsu K.K. Negative-type resist sensitive to ionizing radiation
JPH02127202A (en) * 1988-11-07 1990-05-15 Tokyo Shokai:Kk Dividing device for powdery/granular body
US6022485A (en) * 1997-10-17 2000-02-08 International Business Machines Corporation Method for controlled removal of material from a solid surface

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4649099A (en) * 1981-10-09 1987-03-10 Dai Nippon Insatsu K.K. Negative-type resist sensitive to ionizing radiation
JPS59112701U (en) * 1983-12-22 1984-07-30 湯山　正二 Quantitative dividing device for powder and granular materials in a packaging machine
JPH02127202A (en) * 1988-11-07 1990-05-15 Tokyo Shokai:Kk Dividing device for powdery/granular body
US6022485A (en) * 1997-10-17 2000-02-08 International Business Machines Corporation Method for controlled removal of material from a solid surface
US6254719B1 (en) 1997-10-17 2001-07-03 International Business Machines Corporation Method for controlled removal of material from a solid surface

Also Published As

Publication number Publication date
JPS532840B2 (en) 1978-02-01

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