JPS5361280A - Pattern projector - Google Patents

Pattern projector

Info

Publication number
JPS5361280A
JPS5361280A JP13657576A JP13657576A JPS5361280A JP S5361280 A JPS5361280 A JP S5361280A JP 13657576 A JP13657576 A JP 13657576A JP 13657576 A JP13657576 A JP 13657576A JP S5361280 A JPS5361280 A JP S5361280A
Authority
JP
Japan
Prior art keywords
pattern projector
pattern
segmenting
projected
projector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13657576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574092B2 (Direct
Inventor
Shinjiro Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13657576A priority Critical patent/JPS5361280A/ja
Publication of JPS5361280A publication Critical patent/JPS5361280A/ja
Publication of JPS574092B2 publication Critical patent/JPS574092B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP13657576A 1976-11-12 1976-11-12 Pattern projector Granted JPS5361280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13657576A JPS5361280A (en) 1976-11-12 1976-11-12 Pattern projector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13657576A JPS5361280A (en) 1976-11-12 1976-11-12 Pattern projector

Publications (2)

Publication Number Publication Date
JPS5361280A true JPS5361280A (en) 1978-06-01
JPS574092B2 JPS574092B2 (Direct) 1982-01-25

Family

ID=15178466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13657576A Granted JPS5361280A (en) 1976-11-12 1976-11-12 Pattern projector

Country Status (1)

Country Link
JP (1) JPS5361280A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5463681A (en) * 1977-10-29 1979-05-22 Nippon Aviotronics Kk Electron beam exposure device
JPH0799683B2 (ja) * 1986-03-07 1995-10-25 ヒユ−ズ・エアクラフト・カンパニ− マスクされたイオンビ−ムリソグラフイシステムおよび方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5989084A (ja) * 1982-11-12 1984-05-23 Sony Corp ビデオテ−プ
JPS59110082A (ja) * 1982-12-13 1984-06-25 Sharp Corp ビデオデイスク装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5463681A (en) * 1977-10-29 1979-05-22 Nippon Aviotronics Kk Electron beam exposure device
JPH0799683B2 (ja) * 1986-03-07 1995-10-25 ヒユ−ズ・エアクラフト・カンパニ− マスクされたイオンビ−ムリソグラフイシステムおよび方法

Also Published As

Publication number Publication date
JPS574092B2 (Direct) 1982-01-25

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