JPS5320870A - Semiconductor memory device - Google Patents

Semiconductor memory device

Info

Publication number
JPS5320870A
JPS5320870A JP9487976A JP9487976A JPS5320870A JP S5320870 A JPS5320870 A JP S5320870A JP 9487976 A JP9487976 A JP 9487976A JP 9487976 A JP9487976 A JP 9487976A JP S5320870 A JPS5320870 A JP S5320870A
Authority
JP
Japan
Prior art keywords
memory device
semiconductor memory
layer
type
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9487976A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9487976A priority Critical patent/JPS5320870A/en
Publication of JPS5320870A publication Critical patent/JPS5320870A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices

Abstract

PURPOSE:The scale of integration is increased by forming a control electrode, an insulation layer, a P type layer and an N<+> layer in a vertical type in this order.
JP9487976A 1976-08-11 1976-08-11 Semiconductor memory device Pending JPS5320870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9487976A JPS5320870A (en) 1976-08-11 1976-08-11 Semiconductor memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9487976A JPS5320870A (en) 1976-08-11 1976-08-11 Semiconductor memory device

Publications (1)

Publication Number Publication Date
JPS5320870A true JPS5320870A (en) 1978-02-25

Family

ID=14122327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9487976A Pending JPS5320870A (en) 1976-08-11 1976-08-11 Semiconductor memory device

Country Status (1)

Country Link
JP (1) JPS5320870A (en)

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