JPS5324285A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5324285A
JPS5324285A JP9913776A JP9913776A JPS5324285A JP S5324285 A JPS5324285 A JP S5324285A JP 9913776 A JP9913776 A JP 9913776A JP 9913776 A JP9913776 A JP 9913776A JP S5324285 A JPS5324285 A JP S5324285A
Authority
JP
Japan
Prior art keywords
semiconductor device
gates
integration
poly
spacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9913776A
Other languages
Japanese (ja)
Other versions
JPS6023503B2 (en
Inventor
Kuni Ogawa
Haruyasu Yamada
Tsutomu Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP51099137A priority Critical patent/JPS6023503B2/en
Publication of JPS5324285A publication Critical patent/JPS5324285A/en
Publication of JPS6023503B2 publication Critical patent/JPS6023503B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
    • H01L27/0229—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of bipolar structures
    • H01L27/0233—Integrated injection logic structures [I2L]

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)

Abstract

PURPOSE:A circuit device of a small element area and a high scale of integration is made by forming the gate regions of switching elements with poly-Si, performing uniform and high concentration diffusion down to the lower part and extremely accurately controlling the spacing between gates.
JP51099137A 1976-08-18 1976-08-18 semiconductor equipment Expired JPS6023503B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51099137A JPS6023503B2 (en) 1976-08-18 1976-08-18 semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51099137A JPS6023503B2 (en) 1976-08-18 1976-08-18 semiconductor equipment

Publications (2)

Publication Number Publication Date
JPS5324285A true JPS5324285A (en) 1978-03-06
JPS6023503B2 JPS6023503B2 (en) 1985-06-07

Family

ID=14239320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51099137A Expired JPS6023503B2 (en) 1976-08-18 1976-08-18 semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS6023503B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563432A (en) * 1978-11-07 1980-05-13 Nec Corp Integrated circuit
JPS55174478U (en) * 1979-06-04 1980-12-15

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563432A (en) * 1978-11-07 1980-05-13 Nec Corp Integrated circuit
JPS6211382B2 (en) * 1978-11-07 1987-03-12 Nippon Electric Co
JPS55174478U (en) * 1979-06-04 1980-12-15

Also Published As

Publication number Publication date
JPS6023503B2 (en) 1985-06-07

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