JPS53105982A - Micropattern formation method - Google Patents

Micropattern formation method

Info

Publication number
JPS53105982A
JPS53105982A JP2123377A JP2123377A JPS53105982A JP S53105982 A JPS53105982 A JP S53105982A JP 2123377 A JP2123377 A JP 2123377A JP 2123377 A JP2123377 A JP 2123377A JP S53105982 A JPS53105982 A JP S53105982A
Authority
JP
Japan
Prior art keywords
thin film
formation method
micropattern
micropattern formation
thicknesst
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2123377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152568B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Gokan
Sotaro Edokoro
Yoshimasa Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2123377A priority Critical patent/JPS53105982A/ja
Publication of JPS53105982A publication Critical patent/JPS53105982A/ja
Publication of JPS6152568B2 publication Critical patent/JPS6152568B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP2123377A 1977-02-28 1977-02-28 Micropattern formation method Granted JPS53105982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2123377A JPS53105982A (en) 1977-02-28 1977-02-28 Micropattern formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2123377A JPS53105982A (en) 1977-02-28 1977-02-28 Micropattern formation method

Publications (2)

Publication Number Publication Date
JPS53105982A true JPS53105982A (en) 1978-09-14
JPS6152568B2 JPS6152568B2 (enrdf_load_stackoverflow) 1986-11-13

Family

ID=12049304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2123377A Granted JPS53105982A (en) 1977-02-28 1977-02-28 Micropattern formation method

Country Status (1)

Country Link
JP (1) JPS53105982A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60137023A (ja) * 1983-12-26 1985-07-20 Fujitsu Ltd パタ−ン形成方法およびその実施に使用する装置
JPS60140725A (ja) * 1983-12-28 1985-07-25 Fujitsu Ltd パタ−ン形成方法
JP2012208481A (ja) * 2011-03-11 2012-10-25 Semiconductor Energy Lab Co Ltd 液晶表示装置及び液晶表示装置の作製方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60137023A (ja) * 1983-12-26 1985-07-20 Fujitsu Ltd パタ−ン形成方法およびその実施に使用する装置
JPS60140725A (ja) * 1983-12-28 1985-07-25 Fujitsu Ltd パタ−ン形成方法
JP2012208481A (ja) * 2011-03-11 2012-10-25 Semiconductor Energy Lab Co Ltd 液晶表示装置及び液晶表示装置の作製方法
US9454048B2 (en) 2011-03-11 2016-09-27 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device and manufacturing method of liquid crystal display device

Also Published As

Publication number Publication date
JPS6152568B2 (enrdf_load_stackoverflow) 1986-11-13

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