JPS53101988A - Semiconductor resistance device - Google Patents

Semiconductor resistance device

Info

Publication number
JPS53101988A
JPS53101988A JP1605677A JP1605677A JPS53101988A JP S53101988 A JPS53101988 A JP S53101988A JP 1605677 A JP1605677 A JP 1605677A JP 1605677 A JP1605677 A JP 1605677A JP S53101988 A JPS53101988 A JP S53101988A
Authority
JP
Japan
Prior art keywords
resistance device
semiconductor resistance
forming
conductivity type
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1605677A
Other languages
Japanese (ja)
Inventor
Seiichi Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1605677A priority Critical patent/JPS53101988A/en
Publication of JPS53101988A publication Critical patent/JPS53101988A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/8605—Resistors with PN junctions

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To obtain a high resistance suitable for incorporation into an oscillation circuit using complementary type MIS transistors by forming a shallow region of a low concentration and opposite conductivity type within the region of one conductivity type of a semiconductor substrate through ion implantation thereby forming a resistance layer.
JP1605677A 1977-02-18 1977-02-18 Semiconductor resistance device Pending JPS53101988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1605677A JPS53101988A (en) 1977-02-18 1977-02-18 Semiconductor resistance device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1605677A JPS53101988A (en) 1977-02-18 1977-02-18 Semiconductor resistance device

Publications (1)

Publication Number Publication Date
JPS53101988A true JPS53101988A (en) 1978-09-05

Family

ID=11905914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1605677A Pending JPS53101988A (en) 1977-02-18 1977-02-18 Semiconductor resistance device

Country Status (1)

Country Link
JP (1) JPS53101988A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4984582A (en) * 1972-12-20 1974-08-14
JPS4985972A (en) * 1972-10-04 1974-08-17
JPS50110584A (en) * 1974-02-07 1975-08-30

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4985972A (en) * 1972-10-04 1974-08-17
JPS4984582A (en) * 1972-12-20 1974-08-14
JPS50110584A (en) * 1974-02-07 1975-08-30

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