JPS5385158A - Electrode forming method of semiconductor device - Google Patents
Electrode forming method of semiconductor deviceInfo
- Publication number
- JPS5385158A JPS5385158A JP65077A JP65077A JPS5385158A JP S5385158 A JPS5385158 A JP S5385158A JP 65077 A JP65077 A JP 65077A JP 65077 A JP65077 A JP 65077A JP S5385158 A JPS5385158 A JP S5385158A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- forming method
- electrode forming
- electrode layer
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent disconnection by the recrystallization of the internal wiring formed simultaneously with an electrode layer by forming an ion-implanted layer on the surface of a semiconductor substrate making non-rectifying contact to the electrode layer through the use of an ion implantation method.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP65077A JPS5385158A (en) | 1977-01-06 | 1977-01-06 | Electrode forming method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP65077A JPS5385158A (en) | 1977-01-06 | 1977-01-06 | Electrode forming method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5385158A true JPS5385158A (en) | 1978-07-27 |
Family
ID=11479578
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP65077A Pending JPS5385158A (en) | 1977-01-06 | 1977-01-06 | Electrode forming method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5385158A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61156811A (en) * | 1984-12-28 | 1986-07-16 | Toshiba Corp | Manufacture of semiconductor device |
JPS6255930A (en) * | 1985-09-05 | 1987-03-11 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3666567A (en) * | 1970-01-15 | 1972-05-30 | Hughes Aircraft Co | Method of forming an ohmic contact region in a thin semiconductor layer |
JPS4836981A (en) * | 1971-09-13 | 1973-05-31 |
-
1977
- 1977-01-06 JP JP65077A patent/JPS5385158A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3666567A (en) * | 1970-01-15 | 1972-05-30 | Hughes Aircraft Co | Method of forming an ohmic contact region in a thin semiconductor layer |
JPS4836981A (en) * | 1971-09-13 | 1973-05-31 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61156811A (en) * | 1984-12-28 | 1986-07-16 | Toshiba Corp | Manufacture of semiconductor device |
JPH0455325B2 (en) * | 1984-12-28 | 1992-09-03 | Tokyo Shibaura Electric Co | |
JPS6255930A (en) * | 1985-09-05 | 1987-03-11 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
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