JPS51148380A - Manufacturing method of electric field semiconductor device - Google Patents

Manufacturing method of electric field semiconductor device

Info

Publication number
JPS51148380A
JPS51148380A JP7258775A JP7258775A JPS51148380A JP S51148380 A JPS51148380 A JP S51148380A JP 7258775 A JP7258775 A JP 7258775A JP 7258775 A JP7258775 A JP 7258775A JP S51148380 A JPS51148380 A JP S51148380A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor device
electric field
field semiconductor
omitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7258775A
Other languages
Japanese (ja)
Other versions
JPS5921191B2 (en
Inventor
Shinpei Shiya
Takashi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50072587A priority Critical patent/JPS5921191B2/en
Publication of JPS51148380A publication Critical patent/JPS51148380A/en
Publication of JPS5921191B2 publication Critical patent/JPS5921191B2/en
Expired legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To rise the products ratio -and the reliability of an element with the speed up and the high integration of MIS type FET by doing all the process at low temperature omitting the diffusion process.
COPYRIGHT: (C)1976,JPO&Japio
JP50072587A 1975-06-14 1975-06-14 Method for manufacturing field effect semiconductor device Expired JPS5921191B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50072587A JPS5921191B2 (en) 1975-06-14 1975-06-14 Method for manufacturing field effect semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50072587A JPS5921191B2 (en) 1975-06-14 1975-06-14 Method for manufacturing field effect semiconductor device

Publications (2)

Publication Number Publication Date
JPS51148380A true JPS51148380A (en) 1976-12-20
JPS5921191B2 JPS5921191B2 (en) 1984-05-18

Family

ID=13493653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50072587A Expired JPS5921191B2 (en) 1975-06-14 1975-06-14 Method for manufacturing field effect semiconductor device

Country Status (1)

Country Link
JP (1) JPS5921191B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149469U (en) * 1978-04-05 1979-10-17
US4497106A (en) * 1980-10-29 1985-02-05 Fujitsu Limited Semiconductor device and a method of manufacturing the same
WO2010113715A1 (en) * 2009-03-31 2010-10-07 日鉱金属株式会社 Method of producing semiconductor device, and semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924585A (en) * 1972-06-29 1974-03-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924585A (en) * 1972-06-29 1974-03-05

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54149469U (en) * 1978-04-05 1979-10-17
US4497106A (en) * 1980-10-29 1985-02-05 Fujitsu Limited Semiconductor device and a method of manufacturing the same
WO2010113715A1 (en) * 2009-03-31 2010-10-07 日鉱金属株式会社 Method of producing semiconductor device, and semiconductor device

Also Published As

Publication number Publication date
JPS5921191B2 (en) 1984-05-18

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