JPS5270752A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5270752A
JPS5270752A JP14623675A JP14623675A JPS5270752A JP S5270752 A JPS5270752 A JP S5270752A JP 14623675 A JP14623675 A JP 14623675A JP 14623675 A JP14623675 A JP 14623675A JP S5270752 A JPS5270752 A JP S5270752A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
wafer
scribed
way
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14623675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5751940B2 (cs
Inventor
Akihiro Shibatomi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14623675A priority Critical patent/JPS5270752A/ja
Publication of JPS5270752A publication Critical patent/JPS5270752A/ja
Publication of JPS5751940B2 publication Critical patent/JPS5751940B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
JP14623675A 1975-12-10 1975-12-10 Manufacture of semiconductor device Granted JPS5270752A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14623675A JPS5270752A (en) 1975-12-10 1975-12-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14623675A JPS5270752A (en) 1975-12-10 1975-12-10 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5270752A true JPS5270752A (en) 1977-06-13
JPS5751940B2 JPS5751940B2 (cs) 1982-11-05

Family

ID=15403173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14623675A Granted JPS5270752A (en) 1975-12-10 1975-12-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5270752A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993021663A1 (en) * 1992-04-08 1993-10-28 Georgia Tech Research Corporation Process for lift-off of thin film materials from a growth substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993021663A1 (en) * 1992-04-08 1993-10-28 Georgia Tech Research Corporation Process for lift-off of thin film materials from a growth substrate
US5401983A (en) * 1992-04-08 1995-03-28 Georgia Tech Research Corporation Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices

Also Published As

Publication number Publication date
JPS5751940B2 (cs) 1982-11-05

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