JPS5342579A - Pressure-electricity transducer and its production - Google Patents
Pressure-electricity transducer and its productionInfo
- Publication number
- JPS5342579A JPS5342579A JP11764576A JP11764576A JPS5342579A JP S5342579 A JPS5342579 A JP S5342579A JP 11764576 A JP11764576 A JP 11764576A JP 11764576 A JP11764576 A JP 11764576A JP S5342579 A JPS5342579 A JP S5342579A
- Authority
- JP
- Japan
- Prior art keywords
- production
- pressure
- electricity transducer
- diaphragm
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To facilitate controlling of the thickness and parallelism of a diaphragm by beforehand forming an impurity layer which becomes a specified stopping part for etching within a Si single crystal substrate constituting the diaphragm and etching the substrate down ti this region.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51117645A JPS5938744B2 (en) | 1976-09-29 | 1976-09-29 | Pressure-electricity converter and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51117645A JPS5938744B2 (en) | 1976-09-29 | 1976-09-29 | Pressure-electricity converter and its manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5342579A true JPS5342579A (en) | 1978-04-18 |
JPS5938744B2 JPS5938744B2 (en) | 1984-09-19 |
Family
ID=14716804
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51117645A Expired JPS5938744B2 (en) | 1976-09-29 | 1976-09-29 | Pressure-electricity converter and its manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5938744B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5878470A (en) * | 1981-11-04 | 1983-05-12 | Mitsubishi Electric Corp | Detecting device for semiconductor pressure |
JPS5878471A (en) * | 1981-11-04 | 1983-05-12 | Mitsubishi Electric Corp | Detecting device for semiconductor pressure |
JPS59119872A (en) * | 1982-12-27 | 1984-07-11 | Fujikura Ltd | Forming method of diaphragm of semiconductor pressure sensor |
EP1055920A1 (en) * | 1998-12-09 | 2000-11-29 | Yamatake Corporation | Semiconductor pressure sensor and its manufacturing method |
-
1976
- 1976-09-29 JP JP51117645A patent/JPS5938744B2/en not_active Expired
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5878470A (en) * | 1981-11-04 | 1983-05-12 | Mitsubishi Electric Corp | Detecting device for semiconductor pressure |
JPS5878471A (en) * | 1981-11-04 | 1983-05-12 | Mitsubishi Electric Corp | Detecting device for semiconductor pressure |
JPH0158672B2 (en) * | 1981-11-04 | 1989-12-13 | Mitsubishi Electric Corp | |
JPS59119872A (en) * | 1982-12-27 | 1984-07-11 | Fujikura Ltd | Forming method of diaphragm of semiconductor pressure sensor |
JPH0368544B2 (en) * | 1982-12-27 | 1991-10-28 | Fujikura Ltd | |
EP1055920A1 (en) * | 1998-12-09 | 2000-11-29 | Yamatake Corporation | Semiconductor pressure sensor and its manufacturing method |
EP1055920A4 (en) * | 1998-12-09 | 2007-07-25 | Yamatake Corp | Semiconductor pressure sensor and its manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
JPS5938744B2 (en) | 1984-09-19 |
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