JPS5342579A - Pressure-electricity transducer and its production - Google Patents

Pressure-electricity transducer and its production

Info

Publication number
JPS5342579A
JPS5342579A JP11764576A JP11764576A JPS5342579A JP S5342579 A JPS5342579 A JP S5342579A JP 11764576 A JP11764576 A JP 11764576A JP 11764576 A JP11764576 A JP 11764576A JP S5342579 A JPS5342579 A JP S5342579A
Authority
JP
Japan
Prior art keywords
production
pressure
electricity transducer
diaphragm
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11764576A
Other languages
Japanese (ja)
Other versions
JPS5938744B2 (en
Inventor
Tetsuo Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Priority to JP51117645A priority Critical patent/JPS5938744B2/en
Publication of JPS5342579A publication Critical patent/JPS5342579A/en
Publication of JPS5938744B2 publication Critical patent/JPS5938744B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To facilitate controlling of the thickness and parallelism of a diaphragm by beforehand forming an impurity layer which becomes a specified stopping part for etching within a Si single crystal substrate constituting the diaphragm and etching the substrate down ti this region.
COPYRIGHT: (C)1978,JPO&Japio
JP51117645A 1976-09-29 1976-09-29 Pressure-electricity converter and its manufacturing method Expired JPS5938744B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51117645A JPS5938744B2 (en) 1976-09-29 1976-09-29 Pressure-electricity converter and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51117645A JPS5938744B2 (en) 1976-09-29 1976-09-29 Pressure-electricity converter and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS5342579A true JPS5342579A (en) 1978-04-18
JPS5938744B2 JPS5938744B2 (en) 1984-09-19

Family

ID=14716804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51117645A Expired JPS5938744B2 (en) 1976-09-29 1976-09-29 Pressure-electricity converter and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS5938744B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878470A (en) * 1981-11-04 1983-05-12 Mitsubishi Electric Corp Detecting device for semiconductor pressure
JPS5878471A (en) * 1981-11-04 1983-05-12 Mitsubishi Electric Corp Detecting device for semiconductor pressure
JPS59119872A (en) * 1982-12-27 1984-07-11 Fujikura Ltd Forming method of diaphragm of semiconductor pressure sensor
EP1055920A1 (en) * 1998-12-09 2000-11-29 Yamatake Corporation Semiconductor pressure sensor and its manufacturing method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878470A (en) * 1981-11-04 1983-05-12 Mitsubishi Electric Corp Detecting device for semiconductor pressure
JPS5878471A (en) * 1981-11-04 1983-05-12 Mitsubishi Electric Corp Detecting device for semiconductor pressure
JPH0158672B2 (en) * 1981-11-04 1989-12-13 Mitsubishi Electric Corp
JPS59119872A (en) * 1982-12-27 1984-07-11 Fujikura Ltd Forming method of diaphragm of semiconductor pressure sensor
JPH0368544B2 (en) * 1982-12-27 1991-10-28 Fujikura Ltd
EP1055920A1 (en) * 1998-12-09 2000-11-29 Yamatake Corporation Semiconductor pressure sensor and its manufacturing method
EP1055920A4 (en) * 1998-12-09 2007-07-25 Yamatake Corp Semiconductor pressure sensor and its manufacturing method

Also Published As

Publication number Publication date
JPS5938744B2 (en) 1984-09-19

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