JPS5258360A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5258360A
JPS5258360A JP50133953A JP13395375A JPS5258360A JP S5258360 A JPS5258360 A JP S5258360A JP 50133953 A JP50133953 A JP 50133953A JP 13395375 A JP13395375 A JP 13395375A JP S5258360 A JPS5258360 A JP S5258360A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
diffuse
impurity
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50133953A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5412384B2 (enExample
Inventor
Kei Kirita
Yasutaka Tsuji
Takahiko Moriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50133953A priority Critical patent/JPS5258360A/ja
Priority to US05/738,841 priority patent/US4063973A/en
Publication of JPS5258360A publication Critical patent/JPS5258360A/ja
Publication of JPS5412384B2 publication Critical patent/JPS5412384B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electrodes Of Semiconductors (AREA)
JP50133953A 1975-11-10 1975-11-10 Production of semiconductor device Granted JPS5258360A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50133953A JPS5258360A (en) 1975-11-10 1975-11-10 Production of semiconductor device
US05/738,841 US4063973A (en) 1975-11-10 1976-11-04 Method of making a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50133953A JPS5258360A (en) 1975-11-10 1975-11-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5258360A true JPS5258360A (en) 1977-05-13
JPS5412384B2 JPS5412384B2 (enExample) 1979-05-22

Family

ID=15116924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50133953A Granted JPS5258360A (en) 1975-11-10 1975-11-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5258360A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254426A (ja) * 1985-04-19 1987-03-10 Sanyo Electric Co Ltd 半導体装置の製造方法
JPH01255219A (ja) * 1988-04-05 1989-10-12 Fujitsu Ltd 半導体装置とその製造方法
JPH0236569A (ja) * 1988-07-26 1990-02-06 Nec Corp 半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4850677A (enExample) * 1971-10-20 1973-07-17
JPS4871972A (enExample) * 1971-12-28 1973-09-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4850677A (enExample) * 1971-10-20 1973-07-17
JPS4871972A (enExample) * 1971-12-28 1973-09-28

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254426A (ja) * 1985-04-19 1987-03-10 Sanyo Electric Co Ltd 半導体装置の製造方法
JPH01255219A (ja) * 1988-04-05 1989-10-12 Fujitsu Ltd 半導体装置とその製造方法
JPH0236569A (ja) * 1988-07-26 1990-02-06 Nec Corp 半導体装置

Also Published As

Publication number Publication date
JPS5412384B2 (enExample) 1979-05-22

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