JPS4850677A - - Google Patents

Info

Publication number
JPS4850677A
JPS4850677A JP47104839A JP10483972A JPS4850677A JP S4850677 A JPS4850677 A JP S4850677A JP 47104839 A JP47104839 A JP 47104839A JP 10483972 A JP10483972 A JP 10483972A JP S4850677 A JPS4850677 A JP S4850677A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47104839A
Other languages
Japanese (ja)
Other versions
JPS5234193B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4850677A publication Critical patent/JPS4850677A/ja
Publication of JPS5234193B2 publication Critical patent/JPS5234193B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401Combinations of FETs or IGBTs with BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP47104839A 1971-10-20 1972-10-19 Expired JPS5234193B2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19071971A 1971-10-20 1971-10-20

Publications (2)

Publication Number Publication Date
JPS4850677A true JPS4850677A (enExample) 1973-07-17
JPS5234193B2 JPS5234193B2 (enExample) 1977-09-01

Family

ID=22702482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47104839A Expired JPS5234193B2 (enExample) 1971-10-20 1972-10-19

Country Status (5)

Country Link
JP (1) JPS5234193B2 (enExample)
CA (1) CA969290A (enExample)
DE (1) DE2250570A1 (enExample)
GB (1) GB1384153A (enExample)
IT (1) IT968985B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258360A (en) * 1975-11-10 1977-05-13 Toshiba Corp Production of semiconductor device
JPS5423386A (en) * 1977-07-22 1979-02-21 Hitachi Ltd Manufacture of semiconductor device
JPH02207538A (ja) * 1989-02-08 1990-08-17 Hitachi Ltd 半導体装置の製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7612883A (nl) * 1976-11-19 1978-05-23 Philips Nv Halfgeleiderinrichting, en werkwijze ter ver- vaardiging daarvan.
JPS57100949U (enExample) * 1980-12-09 1982-06-21
GB8507624D0 (en) * 1985-03-23 1985-05-01 Standard Telephones Cables Ltd Semiconductor devices

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258360A (en) * 1975-11-10 1977-05-13 Toshiba Corp Production of semiconductor device
JPS5423386A (en) * 1977-07-22 1979-02-21 Hitachi Ltd Manufacture of semiconductor device
JPH02207538A (ja) * 1989-02-08 1990-08-17 Hitachi Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
IT968985B (it) 1974-03-20
GB1384153A (en) 1975-02-19
DE2250570A1 (de) 1973-04-26
CA969290A (en) 1975-06-10
JPS5234193B2 (enExample) 1977-09-01

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