GB1384153A - Fabrication of semiconductor devices incorporating polycrystalline silicon - Google Patents

Fabrication of semiconductor devices incorporating polycrystalline silicon

Info

Publication number
GB1384153A
GB1384153A GB4721772A GB4721772A GB1384153A GB 1384153 A GB1384153 A GB 1384153A GB 4721772 A GB4721772 A GB 4721772A GB 4721772 A GB4721772 A GB 4721772A GB 1384153 A GB1384153 A GB 1384153A
Authority
GB
United Kingdom
Prior art keywords
silicon
semi
hydrogen
deposited
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4721772A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of GB1384153A publication Critical patent/GB1384153A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401—Combinations of FETs or IGBTs with BJTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
GB4721772A 1971-10-20 1972-10-12 Fabrication of semiconductor devices incorporating polycrystalline silicon Expired GB1384153A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19071971A 1971-10-20 1971-10-20

Publications (1)

Publication Number Publication Date
GB1384153A true GB1384153A (en) 1975-02-19

Family

ID=22702482

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4721772A Expired GB1384153A (en) 1971-10-20 1972-10-12 Fabrication of semiconductor devices incorporating polycrystalline silicon

Country Status (5)

Country Link
JP (1) JPS5234193B2 (enExample)
CA (1) CA969290A (enExample)
DE (1) DE2250570A1 (enExample)
GB (1) GB1384153A (enExample)
IT (1) IT968985B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5258360A (en) * 1975-11-10 1977-05-13 Toshiba Corp Production of semiconductor device
NL7612883A (nl) * 1976-11-19 1978-05-23 Philips Nv Halfgeleiderinrichting, en werkwijze ter ver- vaardiging daarvan.
JPS5423386A (en) * 1977-07-22 1979-02-21 Hitachi Ltd Manufacture of semiconductor device
JPS57100949U (enExample) * 1980-12-09 1982-06-21
GB8507624D0 (en) * 1985-03-23 1985-05-01 Standard Telephones Cables Ltd Semiconductor devices
JPH07101694B2 (ja) * 1989-02-08 1995-11-01 株式会社日立製作所 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5234193B2 (enExample) 1977-09-01
CA969290A (en) 1975-06-10
DE2250570A1 (de) 1973-04-26
JPS4850677A (enExample) 1973-07-17
IT968985B (it) 1974-03-20

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees