Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KKfiledCriticalSeiko Epson Corp
Priority to JP9128375ApriorityCriticalpatent/JPS5215270A/en
Publication of JPS5215270ApublicationCriticalpatent/JPS5215270A/en
PURPOSE: To reduce the number of times pellets are handle, to reduce damage to pellets and to reduce the manufacture cost by moving all semiconductor pellets manufactured from one wafer simultaneously in one pellet tray with the use of a vacuum chuck.
COPYRIGHT: (C)1977,JPO&Japio
JP9128375A1975-07-251975-07-25Method of transporting semiconductor pellets
PendingJPS5215270A
(en)