JPS52150976A - Making method of etching mask - Google Patents
Making method of etching maskInfo
- Publication number
- JPS52150976A JPS52150976A JP6790476A JP6790476A JPS52150976A JP S52150976 A JPS52150976 A JP S52150976A JP 6790476 A JP6790476 A JP 6790476A JP 6790476 A JP6790476 A JP 6790476A JP S52150976 A JPS52150976 A JP S52150976A
- Authority
- JP
- Japan
- Prior art keywords
- etching mask
- making method
- etched
- developing
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To prevent the bonding of the volume swollen at the developing within the width of opening patterns by forming multilayer etching masks composed of photo resist films of required widths on a substrate to be etched.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6790476A JPS52150976A (en) | 1976-06-09 | 1976-06-09 | Making method of etching mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6790476A JPS52150976A (en) | 1976-06-09 | 1976-06-09 | Making method of etching mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52150976A true JPS52150976A (en) | 1977-12-15 |
Family
ID=13358338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6790476A Pending JPS52150976A (en) | 1976-06-09 | 1976-06-09 | Making method of etching mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52150976A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5792836A (en) * | 1980-12-01 | 1982-06-09 | Hitachi Ltd | Etching method polyimide resin film |
-
1976
- 1976-06-09 JP JP6790476A patent/JPS52150976A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5792836A (en) * | 1980-12-01 | 1982-06-09 | Hitachi Ltd | Etching method polyimide resin film |
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