JPS52149992A - Pressure transducer - Google Patents

Pressure transducer

Info

Publication number
JPS52149992A
JPS52149992A JP6660376A JP6660376A JPS52149992A JP S52149992 A JPS52149992 A JP S52149992A JP 6660376 A JP6660376 A JP 6660376A JP 6660376 A JP6660376 A JP 6660376A JP S52149992 A JPS52149992 A JP S52149992A
Authority
JP
Japan
Prior art keywords
layer
pressure transducer
substrate
semiconductor
accommodt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6660376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS575298B2 (Direct
Inventor
Hideyuki Nemoto
Yoshitaka Matsuoka
Tetsuo Kosugi
Tomomasa Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6660376A priority Critical patent/JPS52149992A/ja
Publication of JPS52149992A publication Critical patent/JPS52149992A/ja
Publication of JPS575298B2 publication Critical patent/JPS575298B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP6660376A 1976-06-09 1976-06-09 Pressure transducer Granted JPS52149992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6660376A JPS52149992A (en) 1976-06-09 1976-06-09 Pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6660376A JPS52149992A (en) 1976-06-09 1976-06-09 Pressure transducer

Publications (2)

Publication Number Publication Date
JPS52149992A true JPS52149992A (en) 1977-12-13
JPS575298B2 JPS575298B2 (Direct) 1982-01-29

Family

ID=13320642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6660376A Granted JPS52149992A (en) 1976-06-09 1976-06-09 Pressure transducer

Country Status (1)

Country Link
JP (1) JPS52149992A (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5598323A (en) * 1978-12-22 1980-07-26 United Technologies Corp Vacuummsealed structure for saw pressure sensor
JPS58142289A (ja) * 1982-02-19 1983-08-24 Toshiba Corp センサ−時計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5598323A (en) * 1978-12-22 1980-07-26 United Technologies Corp Vacuummsealed structure for saw pressure sensor
JPS58142289A (ja) * 1982-02-19 1983-08-24 Toshiba Corp センサ−時計

Also Published As

Publication number Publication date
JPS575298B2 (Direct) 1982-01-29

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