JPS5353288A - Piezoelectric substrate - Google Patents

Piezoelectric substrate

Info

Publication number
JPS5353288A
JPS5353288A JP12811076A JP12811076A JPS5353288A JP S5353288 A JPS5353288 A JP S5353288A JP 12811076 A JP12811076 A JP 12811076A JP 12811076 A JP12811076 A JP 12811076A JP S5353288 A JPS5353288 A JP S5353288A
Authority
JP
Japan
Prior art keywords
piezoelectric substrate
bend
performance
reducing
improve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12811076A
Other languages
Japanese (ja)
Other versions
JPS5633872B2 (en
Inventor
Masao Mashita
Kazue Sekikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12811076A priority Critical patent/JPS5353288A/en
Publication of JPS5353288A publication Critical patent/JPS5353288A/en
Publication of JPS5633872B2 publication Critical patent/JPS5633872B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

PURPOSE: To improve the performance as a piezoelectric element, by making chemically corrosive of the coarsely polished surface with a suitable quantity and reducing the bend.
COPYRIGHT: (C)1978,JPO&Japio
JP12811076A 1976-10-25 1976-10-25 Piezoelectric substrate Granted JPS5353288A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12811076A JPS5353288A (en) 1976-10-25 1976-10-25 Piezoelectric substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12811076A JPS5353288A (en) 1976-10-25 1976-10-25 Piezoelectric substrate

Publications (2)

Publication Number Publication Date
JPS5353288A true JPS5353288A (en) 1978-05-15
JPS5633872B2 JPS5633872B2 (en) 1981-08-06

Family

ID=14976623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12811076A Granted JPS5353288A (en) 1976-10-25 1976-10-25 Piezoelectric substrate

Country Status (1)

Country Link
JP (1) JPS5353288A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411693A (en) * 1977-06-28 1979-01-27 Toshiba Corp Processig method for elastic surface wave substrate

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017983A (en) * 2001-06-28 2003-01-17 Kyocera Corp Wafer for elastic wave and elastic wave device employing the same
JP5278004B2 (en) * 2009-01-30 2013-09-04 セイコーエプソン株式会社 Surface acoustic wave element and piezoelectric device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057360A (en) * 1973-09-18 1975-05-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057360A (en) * 1973-09-18 1975-05-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5411693A (en) * 1977-06-28 1979-01-27 Toshiba Corp Processig method for elastic surface wave substrate
JPS5636808B2 (en) * 1977-06-28 1981-08-26

Also Published As

Publication number Publication date
JPS5633872B2 (en) 1981-08-06

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