JPS52147990A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52147990A
JPS52147990A JP6545276A JP6545276A JPS52147990A JP S52147990 A JPS52147990 A JP S52147990A JP 6545276 A JP6545276 A JP 6545276A JP 6545276 A JP6545276 A JP 6545276A JP S52147990 A JPS52147990 A JP S52147990A
Authority
JP
Japan
Prior art keywords
semiconductor device
sus
electrode contact
manufacture
contact window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6545276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6132818B2 (enrdf_load_stackoverflow
Inventor
Kuniaki Makabe
Akisuke Mori
Toshitaka Fukushima
Kazumi Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6545276A priority Critical patent/JPS52147990A/ja
Publication of JPS52147990A publication Critical patent/JPS52147990A/ja
Publication of JPS6132818B2 publication Critical patent/JPS6132818B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP6545276A 1976-06-03 1976-06-03 Manufacture of semiconductor device Granted JPS52147990A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6545276A JPS52147990A (en) 1976-06-03 1976-06-03 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6545276A JPS52147990A (en) 1976-06-03 1976-06-03 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS52147990A true JPS52147990A (en) 1977-12-08
JPS6132818B2 JPS6132818B2 (enrdf_load_stackoverflow) 1986-07-29

Family

ID=13287537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6545276A Granted JPS52147990A (en) 1976-06-03 1976-06-03 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52147990A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6132818B2 (enrdf_load_stackoverflow) 1986-07-29

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