JPS5291656A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5291656A
JPS5291656A JP752876A JP752876A JPS5291656A JP S5291656 A JPS5291656 A JP S5291656A JP 752876 A JP752876 A JP 752876A JP 752876 A JP752876 A JP 752876A JP S5291656 A JPS5291656 A JP S5291656A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
attain
etching
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP752876A
Other languages
Japanese (ja)
Inventor
Nobuhisa Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP752876A priority Critical patent/JPS5291656A/en
Publication of JPS5291656A publication Critical patent/JPS5291656A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To attain a high density integration by forming a window in source drain region through self-adjustment by etching an insulation film formed on a gate region using an oxidized poly-Si gate electrode as a mask.
COPYRIGHT: (C)1977,JPO&Japio
JP752876A 1976-01-28 1976-01-28 Production of semiconductor device Pending JPS5291656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP752876A JPS5291656A (en) 1976-01-28 1976-01-28 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP752876A JPS5291656A (en) 1976-01-28 1976-01-28 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5291656A true JPS5291656A (en) 1977-08-02

Family

ID=11668268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP752876A Pending JPS5291656A (en) 1976-01-28 1976-01-28 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5291656A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153370A (en) * 1979-05-18 1980-11-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacturing method of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153370A (en) * 1979-05-18 1980-11-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacturing method of semiconductor device
JPH0213827B2 (en) * 1979-05-18 1990-04-05 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai

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