JPS5291656A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5291656A JPS5291656A JP752876A JP752876A JPS5291656A JP S5291656 A JPS5291656 A JP S5291656A JP 752876 A JP752876 A JP 752876A JP 752876 A JP752876 A JP 752876A JP S5291656 A JPS5291656 A JP S5291656A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- attain
- etching
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To attain a high density integration by forming a window in source drain region through self-adjustment by etching an insulation film formed on a gate region using an oxidized poly-Si gate electrode as a mask.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP752876A JPS5291656A (en) | 1976-01-28 | 1976-01-28 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP752876A JPS5291656A (en) | 1976-01-28 | 1976-01-28 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5291656A true JPS5291656A (en) | 1977-08-02 |
Family
ID=11668268
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP752876A Pending JPS5291656A (en) | 1976-01-28 | 1976-01-28 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5291656A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55153370A (en) * | 1979-05-18 | 1980-11-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacturing method of semiconductor device |
-
1976
- 1976-01-28 JP JP752876A patent/JPS5291656A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55153370A (en) * | 1979-05-18 | 1980-11-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacturing method of semiconductor device |
JPH0213827B2 (en) * | 1979-05-18 | 1990-04-05 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai |
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